Design and simulation of high Q MEMS LC-tank for oscillators
This research focuses on the design of a high-performance MEMS LC-tank using a high Q MEMS inductor and capacitor. A two different gap varactor has been used to avoid pull-in voltage at 2.4 GHz. The layout has been done by CoventorWare software. The DC voltage is 2.5 v, which is applied to the plate...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis
2009
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| Online Access: | http://psasir.upm.edu.my/id/eprint/13909/ http://psasir.upm.edu.my/id/eprint/13909/1/Design%20and%20simulation%20of%20high%20Q%20MEMS%20LC-tank%20for%20oscillators.pdf |
| _version_ | 1848842245748293632 |
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| author | Rahimi, Maryam Jamuar, Sudhanshu Shekhar Hamidon, Mohd Nizar Ahmad, Mohd Rais |
| author_facet | Rahimi, Maryam Jamuar, Sudhanshu Shekhar Hamidon, Mohd Nizar Ahmad, Mohd Rais |
| author_sort | Rahimi, Maryam |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | This research focuses on the design of a high-performance MEMS LC-tank using a high Q MEMS inductor and capacitor. A two different gap varactor has been used to avoid pull-in voltage at 2.4 GHz. The layout has been done by CoventorWare software. The DC voltage is 2.5 v, which is applied to the plates and results of 2.04 pF could be gained. The Q factor of the varactor is computed at about 557.27, which is good enough to make a low-phase noise VCO. A hollow spiral inductor with a silicon base substrate for compatibility with CMOS technology has been designed. The Greenhouse equation has been used to obtain the dimensions of the inductor. A suspended inductor has been implemented to avoid substrate coupling. The simulation has been done by CoventorWare. The Q factor of the inductor has been calculated using Yue's model. The resultant values of inductance and the Q factor at 2.4 GHz, are 2.89 nH and 27, respectively, which are in good agreement with the results of theoretical computation. The results were verified with the well-documented literature. |
| first_indexed | 2025-11-15T07:56:04Z |
| format | Article |
| id | upm-13909 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T07:56:04Z |
| publishDate | 2009 |
| publisher | Taylor & Francis |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-139092018-08-14T08:53:31Z http://psasir.upm.edu.my/id/eprint/13909/ Design and simulation of high Q MEMS LC-tank for oscillators Rahimi, Maryam Jamuar, Sudhanshu Shekhar Hamidon, Mohd Nizar Ahmad, Mohd Rais This research focuses on the design of a high-performance MEMS LC-tank using a high Q MEMS inductor and capacitor. A two different gap varactor has been used to avoid pull-in voltage at 2.4 GHz. The layout has been done by CoventorWare software. The DC voltage is 2.5 v, which is applied to the plates and results of 2.04 pF could be gained. The Q factor of the varactor is computed at about 557.27, which is good enough to make a low-phase noise VCO. A hollow spiral inductor with a silicon base substrate for compatibility with CMOS technology has been designed. The Greenhouse equation has been used to obtain the dimensions of the inductor. A suspended inductor has been implemented to avoid substrate coupling. The simulation has been done by CoventorWare. The Q factor of the inductor has been calculated using Yue's model. The resultant values of inductance and the Q factor at 2.4 GHz, are 2.89 nH and 27, respectively, which are in good agreement with the results of theoretical computation. The results were verified with the well-documented literature. Taylor & Francis 2009 Article PeerReviewed text en http://psasir.upm.edu.my/id/eprint/13909/1/Design%20and%20simulation%20of%20high%20Q%20MEMS%20LC-tank%20for%20oscillators.pdf Rahimi, Maryam and Jamuar, Sudhanshu Shekhar and Hamidon, Mohd Nizar and Ahmad, Mohd Rais (2009) Design and simulation of high Q MEMS LC-tank for oscillators. International Journal of Electronics, 96 (4). pp. 417-433. ISSN 0020-7217; ESSN: 1362-3060 https://www.tandfonline.com/doi/abs/10.1080/00207210802641221 10.1080/00207210802641221 |
| spellingShingle | Rahimi, Maryam Jamuar, Sudhanshu Shekhar Hamidon, Mohd Nizar Ahmad, Mohd Rais Design and simulation of high Q MEMS LC-tank for oscillators |
| title | Design and simulation of high Q MEMS LC-tank for oscillators |
| title_full | Design and simulation of high Q MEMS LC-tank for oscillators |
| title_fullStr | Design and simulation of high Q MEMS LC-tank for oscillators |
| title_full_unstemmed | Design and simulation of high Q MEMS LC-tank for oscillators |
| title_short | Design and simulation of high Q MEMS LC-tank for oscillators |
| title_sort | design and simulation of high q mems lc-tank for oscillators |
| url | http://psasir.upm.edu.my/id/eprint/13909/ http://psasir.upm.edu.my/id/eprint/13909/ http://psasir.upm.edu.my/id/eprint/13909/ http://psasir.upm.edu.my/id/eprint/13909/1/Design%20and%20simulation%20of%20high%20Q%20MEMS%20LC-tank%20for%20oscillators.pdf |