Design Of Mems Inductor And Varactor For Low Noise Voltage Controlled Oscillators
Micro-Electro-Mechanical-Systems (MEMS) technology has been used to develop high quality factor (Q), low cost and low power consumption circuit blocks in RF communication systems. This research focuses on the design of high-performance MEMS inductor and varactor for use in Complementary Metal-Ox...
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| Format: | Thesis |
| Language: | English English |
| Published: |
2009
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| Subjects: | |
| Online Access: | http://psasir.upm.edu.my/id/eprint/12256/ http://psasir.upm.edu.my/id/eprint/12256/1/FK_2009_41_.pdf |
| _version_ | 1848841794695987200 |
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| author | Rahimi, Maryam |
| author_facet | Rahimi, Maryam |
| author_sort | Rahimi, Maryam |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | Micro-Electro-Mechanical-Systems (MEMS) technology has been used to develop high
quality factor (Q), low cost and low power consumption circuit blocks in RF
communication systems.
This research focuses on the design of high-performance MEMS inductor and varactor
for use in Complementary Metal-Oxide Semiconductor (CMOS) voltage controlled
oscillators (VCO) operating at 2.4 GHz. The air suspended inductor has been designed
using MEMS technology to reduce the resistive loss and the substrate loss. Lowresistivity
material has been used. A MEMS two-gap tunable capacitor, using two parallel
plates (one fixed and one movable), has been designed. The capacitance can be varied by
applying low voltage to the movable plate. The pull-in voltage has been optimized to
achieve low phase noise, low power consumption, and a wide frequency tuning range for
VCO. The MEMS inductor and MEMS capacitor have been used in the design of VCO. The inductor has been modeled with a physical, equivalent two-port model known as
Yue's model to compute the parameters and Q factor of the inductor. The designed
inductor has a Q factor of 27 and the inductance is about 2.87nH at 2.4GHz. The
capacitor has a value of 2.04 pF capacitance and Q factor of 40 at 2.4 GHz.
The proposed MEMS inductor and varactor has been used in simulation of VCO to
determine the effect of high Q factor on the VCO phase noise. The active part of the
circuit has been designed using CMOS. Based on the simulation, low phase noise and
low power consumption have been obtained simultaneously. The results of - 117.7
dBc/Hz at 1 00 KHz and 11m W have been achieved for phase noise and power
consumption of VCO respectively. |
| first_indexed | 2025-11-15T07:48:54Z |
| format | Thesis |
| id | upm-12256 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| language | English English |
| last_indexed | 2025-11-15T07:48:54Z |
| publishDate | 2009 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-122562024-07-09T09:35:32Z http://psasir.upm.edu.my/id/eprint/12256/ Design Of Mems Inductor And Varactor For Low Noise Voltage Controlled Oscillators Rahimi, Maryam Micro-Electro-Mechanical-Systems (MEMS) technology has been used to develop high quality factor (Q), low cost and low power consumption circuit blocks in RF communication systems. This research focuses on the design of high-performance MEMS inductor and varactor for use in Complementary Metal-Oxide Semiconductor (CMOS) voltage controlled oscillators (VCO) operating at 2.4 GHz. The air suspended inductor has been designed using MEMS technology to reduce the resistive loss and the substrate loss. Lowresistivity material has been used. A MEMS two-gap tunable capacitor, using two parallel plates (one fixed and one movable), has been designed. The capacitance can be varied by applying low voltage to the movable plate. The pull-in voltage has been optimized to achieve low phase noise, low power consumption, and a wide frequency tuning range for VCO. The MEMS inductor and MEMS capacitor have been used in the design of VCO. The inductor has been modeled with a physical, equivalent two-port model known as Yue's model to compute the parameters and Q factor of the inductor. The designed inductor has a Q factor of 27 and the inductance is about 2.87nH at 2.4GHz. The capacitor has a value of 2.04 pF capacitance and Q factor of 40 at 2.4 GHz. The proposed MEMS inductor and varactor has been used in simulation of VCO to determine the effect of high Q factor on the VCO phase noise. The active part of the circuit has been designed using CMOS. Based on the simulation, low phase noise and low power consumption have been obtained simultaneously. The results of - 117.7 dBc/Hz at 1 00 KHz and 11m W have been achieved for phase noise and power consumption of VCO respectively. 2009-05 Thesis NonPeerReviewed text en http://psasir.upm.edu.my/id/eprint/12256/1/FK_2009_41_.pdf Rahimi, Maryam (2009) Design Of Mems Inductor And Varactor For Low Noise Voltage Controlled Oscillators. Masters thesis, Universiti Putra Malaysia. Low voltage systems Oscillatory English |
| spellingShingle | Low voltage systems Oscillatory Rahimi, Maryam Design Of Mems Inductor And Varactor For Low Noise Voltage Controlled Oscillators |
| title | Design Of Mems Inductor And Varactor For Low Noise Voltage Controlled Oscillators |
| title_full | Design Of Mems Inductor And Varactor For Low Noise Voltage Controlled Oscillators |
| title_fullStr | Design Of Mems Inductor And Varactor For Low Noise Voltage Controlled Oscillators |
| title_full_unstemmed | Design Of Mems Inductor And Varactor For Low Noise Voltage Controlled Oscillators |
| title_short | Design Of Mems Inductor And Varactor For Low Noise Voltage Controlled Oscillators |
| title_sort | design of mems inductor and varactor for low noise voltage controlled oscillators |
| topic | Low voltage systems Oscillatory |
| url | http://psasir.upm.edu.my/id/eprint/12256/ http://psasir.upm.edu.my/id/eprint/12256/1/FK_2009_41_.pdf |