System on Chip (SOC)-FPGA for multimode vehicle data communication
A method of manufacturing a high electron mobility transistor (1), said method comprising the steps of: − providing a target wafer (10) comprising a target substrate (100); − providing a donor wafer (20) comprising an epitaxial donor film (21); − bonding said donor film (21) to said target wafer (10...
| Main Authors: | , , |
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| Format: | Patent |
| Published: |
2024
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| Online Access: | http://psasir.upm.edu.my/id/eprint/115514/ |
| _version_ | 1848866796897042432 |
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| author | Aris, Ishak Kamsani, Noor 'ain Abdul Halin, Izhal |
| author_facet | Aris, Ishak Kamsani, Noor 'ain Abdul Halin, Izhal |
| author_sort | Aris, Ishak |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | A method of manufacturing a high electron mobility transistor (1), said method comprising the steps of: − providing a target wafer (10) comprising a target substrate (100); − providing a donor wafer (20) comprising an epitaxial donor film (21); − bonding said donor film (21) to said target wafer (10); − separating said donor wafer (20) and said target wafer (10) along said first donor III-N layer (201), thereby forming on said target wafer (10) a top surface layer (221) of 200nm or less; − epitaxially growing an epitaxial III-N semiconductor layer stack (300) on top of said top surface layer (221); − forming a gate contact (41) in a gate region (401); and − forming a substrate galvanic contact (42) contacting said target substrate (100). |
| first_indexed | 2025-11-15T14:26:18Z |
| format | Patent |
| id | upm-115514 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| last_indexed | 2025-11-15T14:26:18Z |
| publishDate | 2024 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-1155142025-03-06T05:53:43Z http://psasir.upm.edu.my/id/eprint/115514/ System on Chip (SOC)-FPGA for multimode vehicle data communication Aris, Ishak Kamsani, Noor 'ain Abdul Halin, Izhal A method of manufacturing a high electron mobility transistor (1), said method comprising the steps of: − providing a target wafer (10) comprising a target substrate (100); − providing a donor wafer (20) comprising an epitaxial donor film (21); − bonding said donor film (21) to said target wafer (10); − separating said donor wafer (20) and said target wafer (10) along said first donor III-N layer (201), thereby forming on said target wafer (10) a top surface layer (221) of 200nm or less; − epitaxially growing an epitaxial III-N semiconductor layer stack (300) on top of said top surface layer (221); − forming a gate contact (41) in a gate region (401); and − forming a substrate galvanic contact (42) contacting said target substrate (100). 2024 Patent NonPeerReviewed Ishak bin Aris (2024) System on Chip (SOC)-FPGA for multimode vehicle data communication. PI2024005657. |
| spellingShingle | Aris, Ishak Kamsani, Noor 'ain Abdul Halin, Izhal System on Chip (SOC)-FPGA for multimode vehicle data communication |
| title | System on Chip (SOC)-FPGA for multimode vehicle data communication |
| title_full | System on Chip (SOC)-FPGA for multimode vehicle data communication |
| title_fullStr | System on Chip (SOC)-FPGA for multimode vehicle data communication |
| title_full_unstemmed | System on Chip (SOC)-FPGA for multimode vehicle data communication |
| title_short | System on Chip (SOC)-FPGA for multimode vehicle data communication |
| title_sort | system on chip (soc)-fpga for multimode vehicle data communication |
| url | http://psasir.upm.edu.my/id/eprint/115514/ |