Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection

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Fabrication of silicon nanowire sensors for highly sensitive pH and DNA hybridization detection

A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly...

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Bibliographic Details
Main Authors:	Abd Rahman, Siti Fatimah, Yusof, Nor Azah, Md Arshad, Mohd Khairuddin, Hashim, Uda, Md Nor, Mohammad Nuzaihan, Hamidon, Mohd Nizar
Format:	Article
Published:	Multidisciplinary Digital Publishing Institute 2022
Online Access:	http://psasir.upm.edu.my/id/eprint/101455/

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