Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions

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Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions

This study investigates the influence of substrate (AISI M42 tool steel) bias voltage (from −30 to −80 V), on the mechanical properties of magnetron sputtered TiSiN coating derived from Ti and Si targets. Thermal stability, microstructure (crystallite size, microstrain, lattice constant), morphology...

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Bibliographic Details
Main Authors:	Mohammadpour, Ehsan, Yun, Willey Hsien Liew, Mondinos, Nicholas, Altarawneh, Mohammednoor, Lee, Sunghwan, Radevski, Nik, Minakshi, Manickam, Amri, Amun, Lim, Hong Ngee, Jiang, Zhong Tao
Format:	Article
Published:	Elsevier 2022
Online Access:	http://psasir.upm.edu.my/id/eprint/101268/

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