Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions
This study investigates the influence of substrate (AISI M42 tool steel) bias voltage (from −30 to −80 V), on the mechanical properties of magnetron sputtered TiSiN coating derived from Ti and Si targets. Thermal stability, microstructure (crystallite size, microstrain, lattice constant), morphology...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Published: |
Elsevier
2022
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| Online Access: | http://psasir.upm.edu.my/id/eprint/101268/ |
| _version_ | 1848863526616039424 |
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| author | Mohammadpour, Ehsan Yun, Willey Hsien Liew Mondinos, Nicholas Altarawneh, Mohammednoor Lee, Sunghwan Radevski, Nik Minakshi, Manickam Amri, Amun Lim, Hong Ngee Jiang, Zhong Tao |
| author_facet | Mohammadpour, Ehsan Yun, Willey Hsien Liew Mondinos, Nicholas Altarawneh, Mohammednoor Lee, Sunghwan Radevski, Nik Minakshi, Manickam Amri, Amun Lim, Hong Ngee Jiang, Zhong Tao |
| author_sort | Mohammadpour, Ehsan |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | This study investigates the influence of substrate (AISI M42 tool steel) bias voltage (from −30 to −80 V), on the mechanical properties of magnetron sputtered TiSiN coating derived from Ti and Si targets. Thermal stability, microstructure (crystallite size, microstrain, lattice constant), morphology and mechanical (hardness, Young's modulus, residual stresses) properties, of the deposited TiSiN coatings, were investigated with synchrotron powered X-ray diffraction (SR-XRD), X-ray photoelectron spectroscopy, field emission scanning electron microscopy, and nanoindentation techniques. Rietveld analysis, of the in-situ SR-XRD, in the temperature range of 25–800 °C, demonstrated cubic TiN form in (Ti,Si)N solid solutions, with TiO2 and Ti2O3 identified at lower bias voltages. Density functional theory supplemented the experimental results. Increase in the bias voltage resulted in: (i) a decrease in Si content, (ii) significant smoothening of surface morphology, (iii) change in the phase composition and microstructure, (iv) improved oxidation resistance and thermal oxidation threshold, and (v) hardness and Young's modulus of the coatings increased up to 50% to 33 GPa and 450 GPa, respectively. |
| first_indexed | 2025-11-15T13:34:19Z |
| format | Article |
| id | upm-101268 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| last_indexed | 2025-11-15T13:34:19Z |
| publishDate | 2022 |
| publisher | Elsevier |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-1012682023-08-18T23:52:17Z http://psasir.upm.edu.my/id/eprint/101268/ Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions Mohammadpour, Ehsan Yun, Willey Hsien Liew Mondinos, Nicholas Altarawneh, Mohammednoor Lee, Sunghwan Radevski, Nik Minakshi, Manickam Amri, Amun Lim, Hong Ngee Jiang, Zhong Tao This study investigates the influence of substrate (AISI M42 tool steel) bias voltage (from −30 to −80 V), on the mechanical properties of magnetron sputtered TiSiN coating derived from Ti and Si targets. Thermal stability, microstructure (crystallite size, microstrain, lattice constant), morphology and mechanical (hardness, Young's modulus, residual stresses) properties, of the deposited TiSiN coatings, were investigated with synchrotron powered X-ray diffraction (SR-XRD), X-ray photoelectron spectroscopy, field emission scanning electron microscopy, and nanoindentation techniques. Rietveld analysis, of the in-situ SR-XRD, in the temperature range of 25–800 °C, demonstrated cubic TiN form in (Ti,Si)N solid solutions, with TiO2 and Ti2O3 identified at lower bias voltages. Density functional theory supplemented the experimental results. Increase in the bias voltage resulted in: (i) a decrease in Si content, (ii) significant smoothening of surface morphology, (iii) change in the phase composition and microstructure, (iv) improved oxidation resistance and thermal oxidation threshold, and (v) hardness and Young's modulus of the coatings increased up to 50% to 33 GPa and 450 GPa, respectively. Elsevier 2022 Article PeerReviewed Mohammadpour, Ehsan and Yun, Willey Hsien Liew and Mondinos, Nicholas and Altarawneh, Mohammednoor and Lee, Sunghwan and Radevski, Nik and Minakshi, Manickam and Amri, Amun and Lim, Hong Ngee and Jiang, Zhong Tao (2022) Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions. Journal of Materials Research and Technology, 17. 1122 - 1131. ISSN 2238-7854; ESSN: 2214-0697 https://www.sciencedirect.com/science/article/pii/S2238785422000394 10.1016/j.jmrt.2022.01.039 |
| spellingShingle | Mohammadpour, Ehsan Yun, Willey Hsien Liew Mondinos, Nicholas Altarawneh, Mohammednoor Lee, Sunghwan Radevski, Nik Minakshi, Manickam Amri, Amun Lim, Hong Ngee Jiang, Zhong Tao Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions |
| title | Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions |
| title_full | Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions |
| title_fullStr | Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions |
| title_full_unstemmed | Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions |
| title_short | Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions |
| title_sort | enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions |
| url | http://psasir.upm.edu.my/id/eprint/101268/ http://psasir.upm.edu.my/id/eprint/101268/ http://psasir.upm.edu.my/id/eprint/101268/ |