The study of the good polishing method for polymer SU-8 waveguide
This research focused on polish characteristic of polymer based waveguides. The aim of the research was to show how polishing parameters affect the cut length of the end surface of SU-8 polymer on silicon and to detemine the best parameters for polishing SU-8 polymer. Then, four samples were used fo...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Optica Applicata
2009
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| Subjects: | |
| Online Access: | http://ir.unimas.my/id/eprint/738/ http://ir.unimas.my/id/eprint/738/1/The%20study%20of%20the%20good%20polishing%20method%20for%20polymer%20SU-8%28abstract%29.pdf |
| _version_ | 1848834607647031296 |
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| author | Mohammad Syuhaimi, Ab-Rahman Fazlinda, Ab-Aziz Noor Azie Azura, Mohd Arif Saiful Dzulkefly, Zan Seri Mastura, Mustaza Abang Annuar, Ehsan Sahbudin, Shaari |
| author_facet | Mohammad Syuhaimi, Ab-Rahman Fazlinda, Ab-Aziz Noor Azie Azura, Mohd Arif Saiful Dzulkefly, Zan Seri Mastura, Mustaza Abang Annuar, Ehsan Sahbudin, Shaari |
| author_sort | Mohammad Syuhaimi, Ab-Rahman |
| building | UNIMAS Institutional Repository |
| collection | Online Access |
| description | This research focused on polish characteristic of polymer based waveguides. The aim of the research was to show how polishing parameters affect the cut length of the end surface of SU-8 polymer on silicon and to detemine the best parameters for polishing SU-8 polymer. Then, four samples were used for characterizing the polishing of polymer. Each sample was polished with the same rotation and sandpaper size but with different rotational speed. The experiment result shows that the best rotational speed for polishing polymer SU-8 sample on silicon is 200 rpm. |
| first_indexed | 2025-11-15T05:54:40Z |
| format | Article |
| id | unimas-738 |
| institution | Universiti Malaysia Sarawak |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T05:54:40Z |
| publishDate | 2009 |
| publisher | Optica Applicata |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | unimas-7382023-08-03T01:47:53Z http://ir.unimas.my/id/eprint/738/ The study of the good polishing method for polymer SU-8 waveguide Mohammad Syuhaimi, Ab-Rahman Fazlinda, Ab-Aziz Noor Azie Azura, Mohd Arif Saiful Dzulkefly, Zan Seri Mastura, Mustaza Abang Annuar, Ehsan Sahbudin, Shaari T Technology (General) TA Engineering (General). Civil engineering (General) TP Chemical technology This research focused on polish characteristic of polymer based waveguides. The aim of the research was to show how polishing parameters affect the cut length of the end surface of SU-8 polymer on silicon and to detemine the best parameters for polishing SU-8 polymer. Then, four samples were used for characterizing the polishing of polymer. Each sample was polished with the same rotation and sandpaper size but with different rotational speed. The experiment result shows that the best rotational speed for polishing polymer SU-8 sample on silicon is 200 rpm. Optica Applicata 2009 Article PeerReviewed text en http://ir.unimas.my/id/eprint/738/1/The%20study%20of%20the%20good%20polishing%20method%20for%20polymer%20SU-8%28abstract%29.pdf Mohammad Syuhaimi, Ab-Rahman and Fazlinda, Ab-Aziz and Noor Azie Azura, Mohd Arif and Saiful Dzulkefly, Zan and Seri Mastura, Mustaza and Abang Annuar, Ehsan and Sahbudin, Shaari (2009) The study of the good polishing method for polymer SU-8 waveguide. Optica Applicata, 39 (3). pp. 459-465. http://www.if.pwr.wroc.pl/~optappl/article.php?lp=706 |
| spellingShingle | T Technology (General) TA Engineering (General). Civil engineering (General) TP Chemical technology Mohammad Syuhaimi, Ab-Rahman Fazlinda, Ab-Aziz Noor Azie Azura, Mohd Arif Saiful Dzulkefly, Zan Seri Mastura, Mustaza Abang Annuar, Ehsan Sahbudin, Shaari The study of the good polishing method for polymer SU-8 waveguide |
| title | The study of the good polishing method for polymer SU-8 waveguide |
| title_full | The study of the good polishing method for polymer SU-8 waveguide |
| title_fullStr | The study of the good polishing method for polymer SU-8 waveguide |
| title_full_unstemmed | The study of the good polishing method for polymer SU-8 waveguide |
| title_short | The study of the good polishing method for polymer SU-8 waveguide |
| title_sort | study of the good polishing method for polymer su-8 waveguide |
| topic | T Technology (General) TA Engineering (General). Civil engineering (General) TP Chemical technology |
| url | http://ir.unimas.my/id/eprint/738/ http://ir.unimas.my/id/eprint/738/ http://ir.unimas.my/id/eprint/738/1/The%20study%20of%20the%20good%20polishing%20method%20for%20polymer%20SU-8%28abstract%29.pdf |