Improving the Structural, Optical and Electrical Properties of ITO Nano-Layered Thin Films by Gas Flow Argon

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Improving the Structural, Optical and Electrical Properties of ITO Nano-Layered Thin Films by Gas Flow Argon

Indium tin oxide (ITO) thin films of 150 nm thickness were deposited on quartz glass substrates by RF sputtering technique, followed by thermal annealing treatment. In this technique, the samples have been annealed at different temperature, 300ᴼC, 400ᴼC, 500ᴼC respectively in Argon...

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Bibliographic Details
Main Authors:	Q. Z., Mehdi, Hegde, Gurumurthy, Mohamad Ashry, Jusoh, Al-Dabbagh, Jinan B., Ahmed, Naser Mahmoud
Format:	Article
Language:	English
Published:	Trans Tech Publications, Switzerland 2014
Subjects:	Q Science (General)
Online Access:	http://umpir.ump.edu.my/id/eprint/8087/ http://umpir.ump.edu.my/id/eprint/8087/1/fist-2014-gurumurthy-Improving_the_structural%2C_optical.PDF

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