Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response

Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response

Copper oxide gas sensor was prepared on silicon wafer by sputtering of copper target at different oxygen flow rate of 0, 4, 8 and 16 sccm using RF magnetron sputtering technique. Argon flow rate, RF power, working pressure and substrate bias voltage were fixed at 50 sccm, 400 W, 22.5 mTorr and −40 V...

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Bibliographic Details
Main Authors: Ahmad Faizal, Mohd Zain, Jia, Wei Low, Nafarizal, Nayan, Mohd Zainizan, Sahdan, Mohd Khairul, Ahmad, Ali Yeon, Md Shakaff, Ammar, Zakaria
Format: Conference or Workshop Item
Language:English
Published: 2014
Subjects:
TS Manufactures
Online Access:http://umpir.ump.edu.my/id/eprint/7371/
http://umpir.ump.edu.my/id/eprint/7371/1/Correlation_between_the_microstructure_of_copper_oxide_thin_film_and_its_gas_sensing_response.pdf

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