Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices

Indium zinc oxide (InZnO) thin films with thicknesses of 100 nm and 200 nm were deposited on glass plate by thermal evaporation technique. Fourier transform infrared spectra showed a strong metal-oxide bond. X-ray diffraction patterns revealed amorphous nature for as-deposited film whereas polycryst...

Full description

Bibliographic Details
Main Authors: Sugumaran, Sathish, Mohd Faizal, Jamlos, Mohd Noor, Ahmad, Bellan, Chandar Shekar, Sivaraj, Manoj
Format: Article
Published: Elsevier 2016
Subjects:
Online Access:http://umpir.ump.edu.my/id/eprint/6779/
_version_ 1848817853618192384
author Sugumaran, Sathish
Mohd Faizal, Jamlos
Mohd Noor, Ahmad
Bellan, Chandar Shekar
Sivaraj, Manoj
author_facet Sugumaran, Sathish
Mohd Faizal, Jamlos
Mohd Noor, Ahmad
Bellan, Chandar Shekar
Sivaraj, Manoj
author_sort Sugumaran, Sathish
building UMP Institutional Repository
collection Online Access
description Indium zinc oxide (InZnO) thin films with thicknesses of 100 nm and 200 nm were deposited on glass plate by thermal evaporation technique. Fourier transform infrared spectra showed a strong metal-oxide bond. X-ray diffraction patterns revealed amorphous nature for as-deposited film whereas polycrystalline structure for annealed films. Scanning electron microscope images showed a uniform distribution of spherical shape grains. Grain size was found to be higher for 200 nm film than 100 nm film. The presence of elements (In, Zn and O) was confirmed from energy dispersive X-ray analysis. Photoluminescence study of 200 nm film showed a blue, blue-green and blue-yellow emission whereas 100 nm film showed a broad green and green-yellow emissions. Both 100 nm and 200 nm films showed good oxygen sensitivity from room temperature to 400 °C. The observed optical and sensor results indicated that the prepared InZnO films are highly potential for room temperature gas sensor and blue, green and yellow emissive opto-electronic devices
first_indexed 2025-11-15T01:28:22Z
format Article
id ump-6779
institution Universiti Malaysia Pahang
institution_category Local University
last_indexed 2025-11-15T01:28:22Z
publishDate 2016
publisher Elsevier
recordtype eprints
repository_type Digital Repository
spelling ump-67792016-06-16T01:16:34Z http://umpir.ump.edu.my/id/eprint/6779/ Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices Sugumaran, Sathish Mohd Faizal, Jamlos Mohd Noor, Ahmad Bellan, Chandar Shekar Sivaraj, Manoj TJ Mechanical engineering and machinery Indium zinc oxide (InZnO) thin films with thicknesses of 100 nm and 200 nm were deposited on glass plate by thermal evaporation technique. Fourier transform infrared spectra showed a strong metal-oxide bond. X-ray diffraction patterns revealed amorphous nature for as-deposited film whereas polycrystalline structure for annealed films. Scanning electron microscope images showed a uniform distribution of spherical shape grains. Grain size was found to be higher for 200 nm film than 100 nm film. The presence of elements (In, Zn and O) was confirmed from energy dispersive X-ray analysis. Photoluminescence study of 200 nm film showed a blue, blue-green and blue-yellow emission whereas 100 nm film showed a broad green and green-yellow emissions. Both 100 nm and 200 nm films showed good oxygen sensitivity from room temperature to 400 °C. The observed optical and sensor results indicated that the prepared InZnO films are highly potential for room temperature gas sensor and blue, green and yellow emissive opto-electronic devices Elsevier 2016 Article PeerReviewed Sugumaran, Sathish and Mohd Faizal, Jamlos and Mohd Noor, Ahmad and Bellan, Chandar Shekar and Sivaraj, Manoj (2016) Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices. Optical Materials, 58. pp. 342-352. ISSN 0925-3467. (Published) http://dx.doi.org/10.1016/j.optmat.2016.05.049 DOI: 10.1016/j.optmat.2016.05.049
spellingShingle TJ Mechanical engineering and machinery
Sugumaran, Sathish
Mohd Faizal, Jamlos
Mohd Noor, Ahmad
Bellan, Chandar Shekar
Sivaraj, Manoj
Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices
title Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices
title_full Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices
title_fullStr Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices
title_full_unstemmed Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices
title_short Thickness and Annealing Effects on Thermally Evaporated InZnO Thin Films for Gas Sensors and Blue, Green and Yellow Emissive Optical Devices
title_sort thickness and annealing effects on thermally evaporated inzno thin films for gas sensors and blue, green and yellow emissive optical devices
topic TJ Mechanical engineering and machinery
url http://umpir.ump.edu.my/id/eprint/6779/
http://umpir.ump.edu.my/id/eprint/6779/
http://umpir.ump.edu.my/id/eprint/6779/