Morphology, Topography and Thickness of Copper Oxide Thin Films Deposited using Magnetron Sputtering Technique

QR Code

Morphology, Topography and Thickness of Copper Oxide Thin Films Deposited using Magnetron Sputtering Technique

Cupric Oxide (CuO) is one of the p-type metal oxide semiconductors that are suitable for use in gas sensing device. The copper oxide thin film was prepared on silicon wafer by sputtering of pure copper target at difference deposition time of 5 min, 10 min and 15 min using RF magnetron sputtering tec...

Full description

Bibliographic Details
Main Authors:	Jia, Wei Low, Nafarizal, Nayan, Mohd Zainizan, Sahdan, Mohd Khairul, Ahmad, Ali Yeon, Md Shakaff, Ammar, Zakaria, Ahmad Faizal, Mohd Zain
Format:	Conference or Workshop Item
Language:	English
Published:	2013
Subjects:	TS Manufactures TP Chemical technology
Online Access:	http://umpir.ump.edu.my/id/eprint/6238/ http://umpir.ump.edu.my/id/eprint/6238/1/Morphology%2C_Topography_and_Thickness_of_Copper.pdf

Similar Items

Spectroscopic Studies of Magnetron Sputtering Plasma Discharge in Cu/O2/Ar Mixture for Copper Oxide Thin Film Fabrication
by: Ahmad Faizal, Mohd Zain, et al.
Published: (2015)

Thickness dependence of the structural and electrical properties of copper films deposited by dc magnetron sputtering technique
by: CHAN, K, et al.
Published: (2006)

Correlation Between the Microstructure of Copper Oxide Thin Film and Its Gas Sensing Response
by: Ahmad Faizal, Mohd Zain, et al.
Published: (2014)

Electrical property of ITO thin film deposited by Rf Magnetron Sputtering
by: Sutjipto, Agus Geter Edy, et al.
Published: (2011)

Influence of substrate annealing on inducing Ti3+ and oxygen vacancy in TiO2 thin films deposited via RF magnetron sputtering
by: Abdullah, S.A., et al.
Published: (2018)

Effect of Ar pressure on grain size of magnetron sputter-deposited Cu thin films
by: Chan, K.Y., et al.
Published: (2007)

RF magnetron sputtered YSZ thin film: Fabrication and characterizations
by: Meskon, Shahrul Razi, et al.
Published: (2010)

Effect Of Post-Annealing In Oxygen Environment On Ito Thin Films Deposited Using RF Magnetron Sputtering
by: Hamzah, N.A., et al.
Published: (2019)

Deposition and characterisation of RF magnetron sputtered phosphate based glasses
by: Stuart, Bryan W.
Published: (2017)

The properties of sputtered copper oxide thin film for sensing application
by: Low, Jia Wei
Published: (2015)

The effect of deposition time on the properties of titanium dioxide thin film prepared using CVD
by: Lias, Jais, et al.
Published: (2020)

Structural and optical properties of RF-sputtered Ge thin films using magnetron sputtering technique
by: Ariffin, Nurul Assikin
Published: (2018)

GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications
by: Sheikh Sarmast, Hadi Mahmodi
Published: (2017)

Magnetron sputtered thin films and composites for automotive and aerospace electrical insulation
by: Hanby, Benjamin, V. T.
Published: (2019)

Study Of Cu-Doped Zno Films Deposited On Different Substrates Using Magnetron Sputtering
by: Yusof, Ahmad Sauffi
Published: (2019)

Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.
by: Ahmadipour, Mohsen
Published: (2018)

Effects Of Post-Deposition Annealing In Oxygen Ambient Of Rf Magnetron Sputtered Ga2O3 Thin Film
by: Hedei, Puteri Haslinda Megat Abdul, et al.
Published: (2020)

Effects Of Post-Deposition Annealing In Oxygen Ambient Of Rf Magnetron Sputtered Ga2O3 Thin Film
by: Hedei, Puteri Haslinda Megat Abdul, et al.
Published: (2020)

Effect on silicon nitride thin films properties at various powers of RF magnetron sputtering
by: Mustafa, Mohd Kamarulzaki, et al.
Published: (2018)

DC Magnetron Deposition And Charaterization of Iron-Platinum Magnetic Thin Films
by: Low, Pei Ling
Published: (2010)

Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film
by: Cheah, Wei Kian
Published: (2017)

Magnetic Properties of Rf Magnetron Sputtered Co-Ag-Cu Granular Thin Films
by: Kabashi, Kabashi Khatir
Published: (2000)

Photoelectrochemical Activity Of Magnetron Sputtered ZnO Thin Films: Role Of Thermal Annealing
by: Almamari, M. R., et al.
Published: (2020)

Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering
by: Bashir, Umar, et al.
Published: (2016)

Characterizations of cupric oxide thin films on glass and silicon substrates by radio frequency magnetron sputtering
by: P.K., Ooi, et al.
Published: (2014)

Sputtering power and deposition pressure effects on the electrical and structural properties of copper thin films
by: Chan, Kah-Yoong, et al.
Published: (2005)

Investigation into the influence of direct current (DC) power in the magnetron sputtering process on the copper crystallite size
by: CHAN, K, et al.
Published: (2007)

Investigation on plasma properties for deposition of titanium nitride film using reactive magnetron sputtering system
by: Soo, Reh How
Published: (2018)

Optical H2 sensing properties of vertically aligned Pd/WO3 nanorods thin films deposited via glancing angle rf magnetron sputtering
by: Wisitsoorat, Anurat, et al.
Published: (2013)

Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
by: Mohamad, Souad A., et al.
Published: (2014)

Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
by: Mohamad, Souad A., et al.
Published: (2015)

Influence of DC magnetron sputtering reaction gas on structural and optical characteristics of Ce-oxide thin films
by: Miran, H., et al.
Published: (2018)

Biocompatible and antibacterial silver tantalum oxide thin film by magnetron sputtering for surgical applications / Rodianah Alias
by: Rodianah , Alias
Published: (2019)

Fabrication and characterization of silicon nitride thin film planar waveguides produced by RF magnetron sputtering technique
by: Majeed, Uzair
Published: (2016)

Aluminium nitride (AlN) as buffer layer for deposition of gallium nitride (GaN) thin films on silicon substrates using magnetron sputtering technique
by: Tahan, Muliana
Published: (2021)

Degradation and characterization of resorbable phosphate-based glass thin-film coatings applied by radio-frequency magnetron sputtering
by: Stuart, Bryan, et al.
Published: (2015)

Synthesis and characterization of nanocrystalline silicon thin films on teflon substrates by RF magnetron sputtering / Norhidayatul Hikmee Mahzan
by: Hikmee Mahzan, Norhidayatul
Published: (2015)

Low-temperature growth of polycrystalline si thin film using RF magnetron sputtering / Shaiful Bakhtiar Hashim
by: Hashim, Shaiful Bakhtiar
Published: (2014)

Giant Magnetoresistance of Silver Nickel Iron Grandular Magnetic Thin Films Prepared by RF Magnetron Sputtering System
by: Lim, Kean Pah
Published: (1998)

Mixed-mode high-power impulse magnetron sputter deposition of tetrahedral amorphous carbon with pulse-length control of ionization
by: Tucker, Mark, et al.
Published: (2016)