Evolutionary Fuzzy ARTMAP Neural Networks for Classification of Semiconductor Defects

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Evolutionary Fuzzy ARTMAP Neural Networks for Classification of Semiconductor Defects

Wafer defect detection using an intelligent system is an approach of quality improvement in semiconductor manufacturing that aims to enhance its process stability, increase production capacity, and improve yields. Occasionally, only few records that indicate defective units are available and they ar...

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Bibliographic Details
Main Authors:	Zuwairie, Ibrahim, Tan, Shing Chiang, Watada, Junzo, Marzuki, Khalid
Format:	Article
Language:	English
Published:	IEEE 2014
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://umpir.ump.edu.my/id/eprint/6190/ http://umpir.ump.edu.my/id/eprint/6190/1/Evolutionary_Fuzzy_ARTMAP_Neural_Networks_for_Classification_of_Semiconductor_Defects.pdf

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