Virtual Laser-micromachining of MEMS Components

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Virtual Laser-micromachining of MEMS Components

Bibliographic Details
Main Authors:	M. F. F., Ab Rashid, M. R. M., Rejab, Mon, Daw T.T, N. S. M., Shalahim, Mohd Fazli, Ismail
Format:	Article
Language:	English
Published:	Academy Publisher 2009
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://umpir.ump.edu.my/id/eprint/5418/ http://umpir.ump.edu.my/id/eprint/5418/1/Virtual%20Laser-micromachining%20of%20MEMS1.pdf

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