On Generation of Micro-Feature on Silicon with an Industrial Laser

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On Generation of Micro-Feature on Silicon with an Industrial Laser

Generation of a micro feature on mono-crystalline silicon surface using an industrial laser is presented. The main objective is to investigate the capability of the industrial laser, Nd:YAG, in generating a micro-feature on silicon surface. The unpolished silicon surface was irradiated with the Nd:Y...

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Bibliographic Details
Main Authors:	M., Ishak, Thet, Thet Mon, Noriah, Bidin, Yap, Tze Chuen
Format:	Article
Language:	English
Published:	Trans Tech Publications 2014
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://umpir.ump.edu.my/id/eprint/4586/ http://umpir.ump.edu.my/id/eprint/4586/1/On_generation_of_micro_feature_on_silicon_with_an_industrial_laser_Materials_science_forum_%282014%29.pdf

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