Fabrication of micro and nanostructures on glass using non-isothermal thermal imprinting

The formation of micro/nano scale pattern features on glass using direct thermal imprinting has gained continuous attention due to its potential to replicate glass with various functional surfaces at an atomic scale resolution. Unfortunately, the long thermal cycle issue in regular thermal imprintin...

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Main Authors: Raja Murfiqah, Raja Mohd Fouzy, Norfazilasari, Yasman, Mohd Zairulnizam, Mohd Zawawi
Format: Conference or Workshop Item
Language:English
English
Published: Elsevier Ltd 2024
Subjects:
Online Access:http://umpir.ump.edu.my/id/eprint/40307/
http://umpir.ump.edu.my/id/eprint/40307/1/Fabrication%20of%20micro%20and%20nanostructures%20on%20glass%20using%20non-isothermal%20thermal%20imprinting%20%28Intro%29.pdf
http://umpir.ump.edu.my/id/eprint/40307/2/Fabrication%20of%20micro%20and%20nanostructures%20on%20glass%20using%20non-isothermal%20thermal%20imprinting.pdf
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author Raja Murfiqah, Raja Mohd Fouzy
Norfazilasari, Yasman
Mohd Zairulnizam, Mohd Zawawi
author_facet Raja Murfiqah, Raja Mohd Fouzy
Norfazilasari, Yasman
Mohd Zairulnizam, Mohd Zawawi
author_sort Raja Murfiqah, Raja Mohd Fouzy
building UMP Institutional Repository
collection Online Access
description The formation of micro/nano scale pattern features on glass using direct thermal imprinting has gained continuous attention due to its potential to replicate glass with various functional surfaces at an atomic scale resolution. Unfortunately, the long thermal cycle issue in regular thermal imprinting remains the main obstacle that hampered the process to be viable for mass production. In this paper, the fabrication of micro/nano scale pattern features directly on glass substrate using non-isothermal thermal imprinting is proposed. Compared to conventional thermal imprinting, this method eliminates the serial process of heating, soaking, pressing, demolding, and cooling that commonly took place in one close chamber. Therefore, the duration of each imprinting cycle is significantly decreased, which in turn could reduce the cost per unit price to fabricate these glass devices with micro and nanostructures. The morphology of these imprinted glass nanograting and microlens array (MLA) was characterized via the scanning electron microscope (SEM), atomic force microscope (AFM) and surface profiler. Overall, the imprinted nanograting and MLA pattern using the non-isothermal thermal imprinting method result showed good replication fidelity, comparable to the regular thermal imprinting and outperforms the conventional one in terms of overall cycle time reduction, minimized variation of mold temperature and lower energy consumption. The proposed method is expected to become an interesting approach for fabrication of various patterns directly on glass substrate with high pattern quality and shorter thermal cycle.
first_indexed 2025-11-15T03:38:04Z
format Conference or Workshop Item
id ump-40307
institution Universiti Malaysia Pahang
institution_category Local University
language English
English
last_indexed 2025-11-15T03:38:04Z
publishDate 2024
publisher Elsevier Ltd
recordtype eprints
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spelling ump-403072024-06-11T04:27:39Z http://umpir.ump.edu.my/id/eprint/40307/ Fabrication of micro and nanostructures on glass using non-isothermal thermal imprinting Raja Murfiqah, Raja Mohd Fouzy Norfazilasari, Yasman Mohd Zairulnizam, Mohd Zawawi TS Manufactures The formation of micro/nano scale pattern features on glass using direct thermal imprinting has gained continuous attention due to its potential to replicate glass with various functional surfaces at an atomic scale resolution. Unfortunately, the long thermal cycle issue in regular thermal imprinting remains the main obstacle that hampered the process to be viable for mass production. In this paper, the fabrication of micro/nano scale pattern features directly on glass substrate using non-isothermal thermal imprinting is proposed. Compared to conventional thermal imprinting, this method eliminates the serial process of heating, soaking, pressing, demolding, and cooling that commonly took place in one close chamber. Therefore, the duration of each imprinting cycle is significantly decreased, which in turn could reduce the cost per unit price to fabricate these glass devices with micro and nanostructures. The morphology of these imprinted glass nanograting and microlens array (MLA) was characterized via the scanning electron microscope (SEM), atomic force microscope (AFM) and surface profiler. Overall, the imprinted nanograting and MLA pattern using the non-isothermal thermal imprinting method result showed good replication fidelity, comparable to the regular thermal imprinting and outperforms the conventional one in terms of overall cycle time reduction, minimized variation of mold temperature and lower energy consumption. The proposed method is expected to become an interesting approach for fabrication of various patterns directly on glass substrate with high pattern quality and shorter thermal cycle. Elsevier Ltd 2024 Conference or Workshop Item PeerReviewed pdf en http://umpir.ump.edu.my/id/eprint/40307/1/Fabrication%20of%20micro%20and%20nanostructures%20on%20glass%20using%20non-isothermal%20thermal%20imprinting%20%28Intro%29.pdf pdf en http://umpir.ump.edu.my/id/eprint/40307/2/Fabrication%20of%20micro%20and%20nanostructures%20on%20glass%20using%20non-isothermal%20thermal%20imprinting.pdf Raja Murfiqah, Raja Mohd Fouzy and Norfazilasari, Yasman and Mohd Zairulnizam, Mohd Zawawi (2024) Fabrication of micro and nanostructures on glass using non-isothermal thermal imprinting. In: Materials Today: Proceedings. Materials Today: Proceedings; 2nd International Symposium on Advanced Functional Materials , 16 Feb 2023 , Kuala Lumpur, Malaysia. pp. 75-81., 97. ISSN 2214-7853 (Published) https://doi.org/10.1016/j.matpr.2023.08.181 10.1016/j.matpr.2023.08.181
spellingShingle TS Manufactures
Raja Murfiqah, Raja Mohd Fouzy
Norfazilasari, Yasman
Mohd Zairulnizam, Mohd Zawawi
Fabrication of micro and nanostructures on glass using non-isothermal thermal imprinting
title Fabrication of micro and nanostructures on glass using non-isothermal thermal imprinting
title_full Fabrication of micro and nanostructures on glass using non-isothermal thermal imprinting
title_fullStr Fabrication of micro and nanostructures on glass using non-isothermal thermal imprinting
title_full_unstemmed Fabrication of micro and nanostructures on glass using non-isothermal thermal imprinting
title_short Fabrication of micro and nanostructures on glass using non-isothermal thermal imprinting
title_sort fabrication of micro and nanostructures on glass using non-isothermal thermal imprinting
topic TS Manufactures
url http://umpir.ump.edu.my/id/eprint/40307/
http://umpir.ump.edu.my/id/eprint/40307/
http://umpir.ump.edu.my/id/eprint/40307/
http://umpir.ump.edu.my/id/eprint/40307/1/Fabrication%20of%20micro%20and%20nanostructures%20on%20glass%20using%20non-isothermal%20thermal%20imprinting%20%28Intro%29.pdf
http://umpir.ump.edu.my/id/eprint/40307/2/Fabrication%20of%20micro%20and%20nanostructures%20on%20glass%20using%20non-isothermal%20thermal%20imprinting.pdf