Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures

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Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures

Major challenges for any direct nanostructuring method on glass substrate is the difficulty to scale up the patterning area to industrial scale. In this work, a rapid and large area direct thermal imprinting of glass nanostructures using silicon mold assisted by CO2 laser irradiation was demonstrate...

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Bibliographic Details
Main Authors:	Lee, Helen, Syarifah Nur Hasanah, Syed Kamarudin, Ismayuzri, Ishak, Ahmad Rosli, Abdul Manaf, Ahmad Shahir, Jamaludin, Mohd Ali Hanafiah, Shaharudin, Mohd Zairulnizam, Mohd Zawawi
Format:	Conference or Workshop Item
Language:	English
Published:	Springer, Singapore 2021
Subjects:	TS Manufactures
Online Access:	http://umpir.ump.edu.my/id/eprint/36984/ http://umpir.ump.edu.my/id/eprint/36984/1/Feasibility%20Study%20of%20Wafer%20Scale%20Laser%20Assisted.pdf

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