Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures
Major challenges for any direct nanostructuring method on glass substrate is the difficulty to scale up the patterning area to industrial scale. In this work, a rapid and large area direct thermal imprinting of glass nanostructures using silicon mold assisted by CO2 laser irradiation was demonstrate...
| Main Authors: | , , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
Springer, Singapore
2021
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/36984/ http://umpir.ump.edu.my/id/eprint/36984/1/Feasibility%20Study%20of%20Wafer%20Scale%20Laser%20Assisted.pdf |
| _version_ | 1848825135961735168 |
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| author | Lee, Helen Syarifah Nur Hasanah, Syed Kamarudin Ismayuzri, Ishak Ahmad Rosli, Abdul Manaf Ahmad Shahir, Jamaludin Mohd Ali Hanafiah, Shaharudin Mohd Zairulnizam, Mohd Zawawi |
| author_facet | Lee, Helen Syarifah Nur Hasanah, Syed Kamarudin Ismayuzri, Ishak Ahmad Rosli, Abdul Manaf Ahmad Shahir, Jamaludin Mohd Ali Hanafiah, Shaharudin Mohd Zairulnizam, Mohd Zawawi |
| author_sort | Lee, Helen |
| building | UMP Institutional Repository |
| collection | Online Access |
| description | Major challenges for any direct nanostructuring method on glass substrate is the difficulty to scale up the patterning area to industrial scale. In this work, a rapid and large area direct thermal imprinting of glass nanostructures using silicon mold assisted by CO2 laser irradiation was demonstrated. Pattern transfer was successful for experiment trial of one spot laser irradiation and laser scanning with imprinting area of 100 mm2 and 400 mm2; confirmed by SEM and AFM measurement. When the method was extended to a larger imprinting area (2000 mm2), the glass was cracked and partially imprinted due to the high cooling rate of the glass after laser irradiation and misalignment of the glass during the contact pressing step in our molding setup. |
| first_indexed | 2025-11-15T03:24:07Z |
| format | Conference or Workshop Item |
| id | ump-36984 |
| institution | Universiti Malaysia Pahang |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T03:24:07Z |
| publishDate | 2021 |
| publisher | Springer, Singapore |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | ump-369842023-02-13T02:35:34Z http://umpir.ump.edu.my/id/eprint/36984/ Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures Lee, Helen Syarifah Nur Hasanah, Syed Kamarudin Ismayuzri, Ishak Ahmad Rosli, Abdul Manaf Ahmad Shahir, Jamaludin Mohd Ali Hanafiah, Shaharudin Mohd Zairulnizam, Mohd Zawawi TS Manufactures Major challenges for any direct nanostructuring method on glass substrate is the difficulty to scale up the patterning area to industrial scale. In this work, a rapid and large area direct thermal imprinting of glass nanostructures using silicon mold assisted by CO2 laser irradiation was demonstrated. Pattern transfer was successful for experiment trial of one spot laser irradiation and laser scanning with imprinting area of 100 mm2 and 400 mm2; confirmed by SEM and AFM measurement. When the method was extended to a larger imprinting area (2000 mm2), the glass was cracked and partially imprinted due to the high cooling rate of the glass after laser irradiation and misalignment of the glass during the contact pressing step in our molding setup. Springer, Singapore 2021 Conference or Workshop Item PeerReviewed pdf en http://umpir.ump.edu.my/id/eprint/36984/1/Feasibility%20Study%20of%20Wafer%20Scale%20Laser%20Assisted.pdf Lee, Helen and Syarifah Nur Hasanah, Syed Kamarudin and Ismayuzri, Ishak and Ahmad Rosli, Abdul Manaf and Ahmad Shahir, Jamaludin and Mohd Ali Hanafiah, Shaharudin and Mohd Zairulnizam, Mohd Zawawi (2021) Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures. In: Recent Trends in Manufacturing and Materials Towards Industry 4.0: Selected Articles from iM3F 2020, Malaysia , 6 August 2020 , Virtually hosted by Universiti Malaysia Pahang. pp. 917-923.. ISBN 978-981-15-9505-9 (Published) https://doi.org/10.1007/978-981-15-9505-9_80 |
| spellingShingle | TS Manufactures Lee, Helen Syarifah Nur Hasanah, Syed Kamarudin Ismayuzri, Ishak Ahmad Rosli, Abdul Manaf Ahmad Shahir, Jamaludin Mohd Ali Hanafiah, Shaharudin Mohd Zairulnizam, Mohd Zawawi Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures |
| title | Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures |
| title_full | Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures |
| title_fullStr | Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures |
| title_full_unstemmed | Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures |
| title_short | Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures |
| title_sort | feasibility study of wafer scale laser assisted thermal imprinting of glass nanostructures |
| topic | TS Manufactures |
| url | http://umpir.ump.edu.my/id/eprint/36984/ http://umpir.ump.edu.my/id/eprint/36984/ http://umpir.ump.edu.my/id/eprint/36984/1/Feasibility%20Study%20of%20Wafer%20Scale%20Laser%20Assisted.pdf |