Rapid Fabrication of Glass Micro and Nanostructures via Laser-assisted Hot Embossing
The escalating demand for glass that exhibits various surface functions has encouraged efforts to develop more efficient and economical micro-/nano-patterning of glass substrates. We propose rapid hot embossing of glass micro-/nanostructures using an infrared transmissive mold assisted by CO2 laser...
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| Format: | Article |
| Language: | English |
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Japan Laser Processing Society
2023
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| Online Access: | http://umpir.ump.edu.my/id/eprint/36973/ http://umpir.ump.edu.my/id/eprint/36973/1/SCIE%20Journal_Rapid%20Fabrication%20of%20Glass%20Micro%20and%20Nanostructures%20via%20Laser-assisted.pdf |
| _version_ | 1848825133068713984 |
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| author | Lee, Helen May Shian Ismayuzri, Ishak Mohd Zairulnizam, Mohd Zawawi |
| author_facet | Lee, Helen May Shian Ismayuzri, Ishak Mohd Zairulnizam, Mohd Zawawi |
| author_sort | Lee, Helen May Shian |
| building | UMP Institutional Repository |
| collection | Online Access |
| description | The escalating demand for glass that exhibits various surface functions has encouraged efforts to develop more efficient and economical micro-/nano-patterning of glass substrates. We propose rapid hot embossing of glass micro-/nanostructures using an infrared transmissive mold assisted by CO2 laser irradiation. This resistless, etch-free technique utilizes the synergy of the silicon mold’s high transmittance and strong optical absorption of the glass at a 10.6-μm wavelength. Furthermore, this non-isothermal process requires preheating of the glass temperature below the glass transformation point (Tg) of the glass, eliminating the soaking time, and using a short contact pressing time and a lower pressing load to produce high-resolution space patterns. The method is capable of instantaneous high-resolution replication of various grating patterns from the nano- to microscale with a single laser scan. By controlling the scanning speed and ensuring sufficient pressure and heating depth on the glass surface, 250-nm to 50-μm line- widths and space patterns were embossed in a few seconds with excellent replication fidelity. The laser-assisted hot embossing methods developed in this study facil-itated high-throughput, energy-efficient, reproducible, and highly accurate micro-/nano-patterning of glass surfaces. |
| first_indexed | 2025-11-15T03:24:04Z |
| format | Article |
| id | ump-36973 |
| institution | Universiti Malaysia Pahang |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T03:24:04Z |
| publishDate | 2023 |
| publisher | Japan Laser Processing Society |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | ump-369732023-02-10T08:43:27Z http://umpir.ump.edu.my/id/eprint/36973/ Rapid Fabrication of Glass Micro and Nanostructures via Laser-assisted Hot Embossing Lee, Helen May Shian Ismayuzri, Ishak Mohd Zairulnizam, Mohd Zawawi TS Manufactures The escalating demand for glass that exhibits various surface functions has encouraged efforts to develop more efficient and economical micro-/nano-patterning of glass substrates. We propose rapid hot embossing of glass micro-/nanostructures using an infrared transmissive mold assisted by CO2 laser irradiation. This resistless, etch-free technique utilizes the synergy of the silicon mold’s high transmittance and strong optical absorption of the glass at a 10.6-μm wavelength. Furthermore, this non-isothermal process requires preheating of the glass temperature below the glass transformation point (Tg) of the glass, eliminating the soaking time, and using a short contact pressing time and a lower pressing load to produce high-resolution space patterns. The method is capable of instantaneous high-resolution replication of various grating patterns from the nano- to microscale with a single laser scan. By controlling the scanning speed and ensuring sufficient pressure and heating depth on the glass surface, 250-nm to 50-μm line- widths and space patterns were embossed in a few seconds with excellent replication fidelity. The laser-assisted hot embossing methods developed in this study facil-itated high-throughput, energy-efficient, reproducible, and highly accurate micro-/nano-patterning of glass surfaces. Japan Laser Processing Society 2023 Article PeerReviewed pdf en http://umpir.ump.edu.my/id/eprint/36973/1/SCIE%20Journal_Rapid%20Fabrication%20of%20Glass%20Micro%20and%20Nanostructures%20via%20Laser-assisted.pdf Lee, Helen May Shian and Ismayuzri, Ishak and Mohd Zairulnizam, Mohd Zawawi (2023) Rapid Fabrication of Glass Micro and Nanostructures via Laser-assisted Hot Embossing. JLMN-Journal of Laser Micro/Nanoengineering, 18 (1). pp. 1-7. ISSN 1880-0688. (Published) http://www.jlps.gr.jp/jlmn/ |
| spellingShingle | TS Manufactures Lee, Helen May Shian Ismayuzri, Ishak Mohd Zairulnizam, Mohd Zawawi Rapid Fabrication of Glass Micro and Nanostructures via Laser-assisted Hot Embossing |
| title | Rapid Fabrication of Glass Micro and Nanostructures via Laser-assisted Hot Embossing |
| title_full | Rapid Fabrication of Glass Micro and Nanostructures via Laser-assisted Hot Embossing |
| title_fullStr | Rapid Fabrication of Glass Micro and Nanostructures via Laser-assisted Hot Embossing |
| title_full_unstemmed | Rapid Fabrication of Glass Micro and Nanostructures via Laser-assisted Hot Embossing |
| title_short | Rapid Fabrication of Glass Micro and Nanostructures via Laser-assisted Hot Embossing |
| title_sort | rapid fabrication of glass micro and nanostructures via laser-assisted hot embossing |
| topic | TS Manufactures |
| url | http://umpir.ump.edu.my/id/eprint/36973/ http://umpir.ump.edu.my/id/eprint/36973/ http://umpir.ump.edu.my/id/eprint/36973/1/SCIE%20Journal_Rapid%20Fabrication%20of%20Glass%20Micro%20and%20Nanostructures%20via%20Laser-assisted.pdf |