An artificial neural network approach for classification and prediction of low pressure chemical vapor deposition SixNy ISFET pH sensor drift

An artificial neural network approach for classification and prediction of low pressure chemical vapor deposition SixNy ISFET pH sensor drift

A sensor in an ion selective field-effect transistor (ISFET) is a field sensor in which ions within a sample media undergo multiple environments affecting reactions occurring molecules to concentrate at the gate oxide layer. A change in electrical charge occurs and it affects the conductance in the...

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Bibliographic Details
Main Author: Mohammad Iqwhanus Syaffa, Amir
Format: Thesis
Language:English
Published: 2019
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://umpir.ump.edu.my/id/eprint/30027/
http://umpir.ump.edu.my/id/eprint/30027/1/An%20artificial%20neural%20network%20approach%20for%20classification%20and%20prediction%20of%20low%20pressure%20chemical%20vapor.wm.pdf

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