Dedicated fixture design for polishing of silicon

QR Code

Dedicated fixture design for polishing of silicon

Polishing of silicon is a major process seen in microelectronic and optical industries. As mirror-like surface finish is an essential factor that influences the performance of electronic and optical products, it has been believed that the fixture in finite element does play a role to produce such a...

Full description

Bibliographic Details
Main Author:	Taufif, Zakaria
Format:	Undergraduates Project Papers
Language:	English
Published:	2008
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://umpir.ump.edu.my/id/eprint/300/ http://umpir.ump.edu.my/id/eprint/300/1/23.Dedicated%20fixture%20design%20for%20polishing%20of%20silicon.pdf

Similar Items

Design and fabrication of reliability test fixtures (hook button stroke)
by: Muhammad Izzat, Haslan
Published: (2009)

Design And Fabrication Of Modular Fixture To Accommodate Flexible Assembly Systems
by: Abu Bakar, Md. Nazri
Published: (2005)

Enhancing μ-wedming (wire electro-discharge machining) of polished silicon wafer by conductive coating
by: Rasheed, Aous Naji, et al.
Published: (2014)

Rheological Properties of Magnetorheological Polishing Fluid for Micro Mould Polishing
by: Nurain, Abdul Mutalib, et al.
Published: (2019)

Electro-chemical mechanical polishing of copper and chemical mechanical polishing of glass
by: Venkatesh, Vasisht C., et al.
Published: (2004)

A Simplified Design of Clamping System and Fixtures for Friction Stir Welding of Aluminium Alloys
by: Hasan, Mohammed M., et al.
Published: (2015)

Development of portable checking fixture device for automotive quality-confirmation inspection
by: Bastian Wibar, Momang
Published: (2017)

Pressure gradient and geometrical variation of the abrasive blocks during the polishing process of ceramic tiles with line contact
by: Amiril Sahab, Abdul Sani
Published: (2014)

A study of lapping parameters to reduce polishing time of optical glass
by: Elshwain, Amad Alddein
Published: (2007)

Characterization of polished silicon wafer / by Rajan Subramaniam.
by: Subramaniam, Rajan
Published: (2003)

Design and modeling of silicon MEMS accelerometer
by: Hrairi, Meftah, et al.
Published: (2011)

Influence of internal fill pattern, polishing time and Z-Axis orientation on the tensile strength of the 3D printed part
by: Seprianto, Dicky, et al.
Published: (2019)

Application of taguchi and box-behnken designs for surface roughness in precision grinding of silicon
by: Alao, Abdul-Raheed, et al.
Published: (2011)

A new method for waterjet peening process improvement using a combination of waterjet surface hardening and polishing
by: Mohd Azmir, Mohd Azhari
Published: (2014)

Experimental laser-machining of silicon wafer
by: Lau, Zhen Chyen
Published: (2010)

Precision micro-machining of silicon and glass
by: Venkatesh, V. C., et al.
Published: (2002)

Investigation of micromachining of silicon using micro-EDM = penyelidikan dalam pemesinan mikro bagi silicon menggunakan EDM mikro
by: Mahendran, Samykano, et al.
Published: (2011)

On Generation of Micro-Feature on Silicon with an Industrial Laser
by: M., Ishak, et al.
Published: (2014)

Investigation of micromachining of silicon using micro-EDM
by: Samykano, M., et al.
Published: (2011)

Experimental micromachining of silicon with Nd-YAG laser
by: Mon, Thet Thet, et al.
Published: (2011)

Virtual reality for fixture design and assembly
by: Li, Qiang
Published: (2009)

Finite element study of metacarpophalangeal joint silicone implants
by: Abdul Kadir, Mohammed Rafiq, et al.
Published: (2008)

Synthesis and characterization of nickel-iron-silicon nitride nanocomposite
by: Marita, Yusrini, et al.
Published: (2010)

Feasible laser parameters in fabrication of MEMS structures on silicon
by: Yong, Chee Ping
Published: (2010)

Thermal response of silicon during virtual laser micromachining
by: Muhammad Hasri, Ibrahim
Published: (2009)

Etching performance of silicon wafers with redesigned etching drum
by: Dolah, Rozzeta
Published: (2006)

An experimental investigation on partial-ductile mode grinding of silicon
by: Konneh, M.
Published: (2002)

Settling of silicon carbide particles in cast metal matrix composites
by: Ourdjini, A., et al.
Published: (2001)

Nanoindentation Of Copper Thin Film On Silicon Substrates
by: Zalkapli, Muhammad Amir
Published: (2022)

Finite Element Prediction of Heat-Affected Zone in Laser-micromachining of Silicon
by: T. T., Mon, et al.
Published: (2008)

Processing and Mechanical Properties of Aluminium-Silicon Carbide Metal Matrix Composites
by: Nuruzzaman, D. M., et al.
Published: (2016)

Preparation and Stability of Silicone Dioxide Dispersed in Polyalkylene Glycol based Nanolubricants
by: M. Z., Sharif, et al.
Published: (2017)

Precision manufacture of spherical and aspheric surfaces on plastics, glass, silicon and germanium
by: Venkatesh, Vasisht, C.
Published: (2003)

The effect of pressure gradient and abrasive tool wear when polishing ceramic tiles
by: Amiril Sahab, Abdul Sani, et al.
Published: (2020)

Modelling and design methodology for fully-active fixtures
by: Papastathis, Thomas
Published: (2011)

A novel electro conductive graphene/silicon-dioxide thermo-electric generator
by: Rahman, Mohammed Ataur, et al.
Published: (2017)

Optimization of precision grinding parameters of silicon for surface roughness based on taguchi method
by: Abdur-Rasheed, Alao, et al.
Published: (2011)

Implementation of high speed of silicon using diamond coated tools with air blowing
by: Amin, A. K. M. Nurul, et al.
Published: (2011)

PCD inserts in end milling of Aluminum Silicon Carbide (AlSiC)
by: M. K. , Nor Khairusshima, et al.
Published: (2011)

Neodymium oxide thin film gate oxide on silicon substrate / Hetherin Karuppiah
by: Hetherin , Karuppiah
Published: (2018)