The fabrication of microelectrode array biochip on PET using plate-to-plate NIL
Polyethylene terephthalate (PET) films are useful for various applications due to the characterization of PET were flexibility, thermal resistance and chemical resistant. PET Films are widely used in both commercial and industrial today since they are highly demand in the market. In this study, micr...
| Main Authors: | , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
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AIP Publishing
2017
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| Online Access: | http://umpir.ump.edu.my/id/eprint/29622/ http://umpir.ump.edu.my/id/eprint/29622/1/The%20fabrication%20of%20microelectrode%20array%20biochip%20on%20PET%20.pdf |
| _version_ | 1848823322895187968 |
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| author | Beh, Khi Khim Fahmi, Samsuri Lee, Lai Seng Ooi, Su Guan Ong, Wei Jie Khairudin, Mohamed |
| author_facet | Beh, Khi Khim Fahmi, Samsuri Lee, Lai Seng Ooi, Su Guan Ong, Wei Jie Khairudin, Mohamed |
| author_sort | Beh, Khi Khim |
| building | UMP Institutional Repository |
| collection | Online Access |
| description | Polyethylene terephthalate (PET) films are useful for various applications due to the characterization of PET were flexibility, thermal resistance and chemical resistant. PET Films are widely used in both commercial and industrial today since they are highly demand in the market. In this study, microelectrode array biochip was fabricated on flexible PET film using (plate-to-plate) nanoimprint lithography (NIL). The PET films acted as substrate while PDMS as the mould. The Polydimethylsiloxane (PDMS) mould was attached on top of the PET film and additionally clamped between two pieces of glass. A mild force was applied to it for REM (replica moulding). A study was carried out upon the surface profiling of the PDMS mould and PET to monitor the possibility of deformation after applying force upon the samples. The experiment shall present the finding of required force to REM the microelectrode array biochip pattern on the PET film. |
| first_indexed | 2025-11-15T02:55:18Z |
| format | Conference or Workshop Item |
| id | ump-29622 |
| institution | Universiti Malaysia Pahang |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T02:55:18Z |
| publishDate | 2017 |
| publisher | AIP Publishing |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | ump-296222020-11-20T01:11:39Z http://umpir.ump.edu.my/id/eprint/29622/ The fabrication of microelectrode array biochip on PET using plate-to-plate NIL Beh, Khi Khim Fahmi, Samsuri Lee, Lai Seng Ooi, Su Guan Ong, Wei Jie Khairudin, Mohamed TK Electrical engineering. Electronics Nuclear engineering Polyethylene terephthalate (PET) films are useful for various applications due to the characterization of PET were flexibility, thermal resistance and chemical resistant. PET Films are widely used in both commercial and industrial today since they are highly demand in the market. In this study, microelectrode array biochip was fabricated on flexible PET film using (plate-to-plate) nanoimprint lithography (NIL). The PET films acted as substrate while PDMS as the mould. The Polydimethylsiloxane (PDMS) mould was attached on top of the PET film and additionally clamped between two pieces of glass. A mild force was applied to it for REM (replica moulding). A study was carried out upon the surface profiling of the PDMS mould and PET to monitor the possibility of deformation after applying force upon the samples. The experiment shall present the finding of required force to REM the microelectrode array biochip pattern on the PET film. AIP Publishing 2017-07-21 Conference or Workshop Item PeerReviewed pdf en http://umpir.ump.edu.my/id/eprint/29622/1/The%20fabrication%20of%20microelectrode%20array%20biochip%20on%20PET%20.pdf Beh, Khi Khim and Fahmi, Samsuri and Lee, Lai Seng and Ooi, Su Guan and Ong, Wei Jie and Khairudin, Mohamed (2017) The fabrication of microelectrode array biochip on PET using plate-to-plate NIL. In: AIP Conference Proceedings, 3rd International Conference of Global Network for Innovative Technology 2016: Advanced Materials for Innovative Technologies (IGNITE 2016) , 27-29 January 2016 , Penang, Malaysia. pp. 1-2., 1865 (070001). ISSN 0094-243X ISBN 9780735415454 (Published) https://doi.org/10.1063/1.4993383 |
| spellingShingle | TK Electrical engineering. Electronics Nuclear engineering Beh, Khi Khim Fahmi, Samsuri Lee, Lai Seng Ooi, Su Guan Ong, Wei Jie Khairudin, Mohamed The fabrication of microelectrode array biochip on PET using plate-to-plate NIL |
| title | The fabrication of microelectrode array biochip on PET using plate-to-plate NIL |
| title_full | The fabrication of microelectrode array biochip on PET using plate-to-plate NIL |
| title_fullStr | The fabrication of microelectrode array biochip on PET using plate-to-plate NIL |
| title_full_unstemmed | The fabrication of microelectrode array biochip on PET using plate-to-plate NIL |
| title_short | The fabrication of microelectrode array biochip on PET using plate-to-plate NIL |
| title_sort | fabrication of microelectrode array biochip on pet using plate-to-plate nil |
| topic | TK Electrical engineering. Electronics Nuclear engineering |
| url | http://umpir.ump.edu.my/id/eprint/29622/ http://umpir.ump.edu.my/id/eprint/29622/ http://umpir.ump.edu.my/id/eprint/29622/1/The%20fabrication%20of%20microelectrode%20array%20biochip%20on%20PET%20.pdf |