Experimental micromachining of silicon with Nd-YAG laser

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Experimental micromachining of silicon with Nd-YAG laser

This research centers on experimental laser-micromachining of silicon using solid state pulsed Nd:YAG laser. The laser is equipped with 3-axis controllers with resolution of 1 μm. The main objective is to find out the possibility of using this laser machining system to fabricate a micro feature on s...

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Bibliographic Details
Main Authors:	Mon, Thet Thet, Khairul Fikri, Muhammad, Asnul Hadi, Ahmad, Zazuli, Mohid
Format:	Conference or Workshop Item
Language:	English
Published:	2011
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://umpir.ump.edu.my/id/eprint/26175/ http://umpir.ump.edu.my/id/eprint/26175/1/Experimental%20Micromachining%20of%20Silicon%20with%20Nd-YAG%20Laser.pdf

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