Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application

Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application

Biochip is a promising device with capabilities of performing sorting, trapping and screening a large number of biological samples in a short time. Fabrication of biochip pattern process leads to an opening study towards the development of a working biochip. The traditional photolithography process...

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Bibliographic Details
Main Author: Beh, Khi Khim
Format: Thesis
Language:English
Published: 2016
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://umpir.ump.edu.my/id/eprint/18147/
http://umpir.ump.edu.my/id/eprint/18147/19/Process%20development%20of%20the%20device%20using%20in-house%20plate-to-plate%20tool%20with%20nanoimprint%20lithography%20technique%20for%20biochip%20application.pdf

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