Thermal response of silicon during virtual laser micromachining

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Thermal response of silicon during virtual laser micromachining

This project presents thermal response of silicon during virtual laser micromachining based on finite element method. Predictable models were developed using ALGOR FE code to simulate laser micromachining and to predict temperature distribution in silicon due to laser material interaction. Two FE mo...

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Bibliographic Details
Main Author:	Muhammad Hasri, Ibrahim
Format:	Thesis
Language:	English
Published:	2009
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://umpir.ump.edu.my/id/eprint/16988/ http://umpir.ump.edu.my/id/eprint/16988/25/Thermal%20response%20of%20silicon%20during%20virtual%20laser%20micromachining.pdf

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