Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer

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Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer

In this paper, we discuss the analysis of out-of-plane characterization of a capacitive tri-axis accelerometer fabricated using SOI MUMPS (Silicon-on Insulator Multi user MEMS Processes) process flow and the results are compared with simulated results. The device is designed with wide operational 3...

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Bibliographic Details
Main Authors:	L., Sujatha, S., Kalaiselvi, Vigneswaran, Narayanamurthy
Format:	Article
Language:	English
Published:	IFSA Publishing, S.L. 2016
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://umpir.ump.edu.my/id/eprint/16924/ http://umpir.ump.edu.my/id/eprint/16924/1/fkee-2016-vigneswaran-Out-of-plane%20Characterization.pdf

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