Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study

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Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study

In this paper, we present the design and analysis of the proof mass for capacitive based MEMS accelerometers. A study was done to determine the parameters (length of hinge and number of combs) to be optimized for the MEMS accelerometer design. The proposed design can measure the acceleration in xx-,...

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Bibliographic Details
Main Authors:	Narayanamurthy, Vigneswaran, Lakshminarayanan, Sujatha, Yacin, S. Mohamed, Fahmi, Samsuri
Format:	Article
Language:	English
Published:	World Scientific Publishing Co Pte Ltd 2017
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://umpir.ump.edu.my/id/eprint/16921/ http://umpir.ump.edu.my/id/eprint/16921/1/fkee-2017-Vigneswaran-Design%20optimization1.pdf

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