Feasible laser parameters in fabrication of MEMS structures on silicon

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Feasible laser parameters in fabrication of MEMS structures on silicon

The technique of making MEMS structures are kept improving which from old fashion with high cost machine to very advanced one to save time and labor cost. In this report, laser machining of silicon using ND:YAG is introduced. The main objectives are generating MEMS structures on silicon wafer by usi...

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Bibliographic Details
Main Author:	Yong, Chee Ping
Format:	Undergraduates Project Papers
Language:	English
Published:	2010
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://umpir.ump.edu.my/id/eprint/1502/ http://umpir.ump.edu.my/id/eprint/1502/1/Yong%2C_Chee_Ping_%28_CD_5034_%29.pdf

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