Design of Electrostatic Comb Actuators based on Finite Element Method

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Design of Electrostatic Comb Actuators based on Finite Element Method

Electrostatic comb actuators are commonly used to provide displacement-invariant force in micro electro-mechanical system (MEMS). Major application can be found in resonator, inertial sensor, accelerometer, and gyroscope. The size of the comb may be a few microns to millimeters. Principally, the ele...

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Bibliographic Details
Main Authors:	Mon, Thet Thet, Z., Ghazalli, Asnul Hadi, Ahmad, Mohd Fazli, Ismail, Khairul Fikri, Muhammad
Format:	Conference or Workshop Item
Language:	English English
Published:	2010
Subjects:	T Technology (General) TJ Mechanical engineering and machinery
Online Access:	http://umpir.ump.edu.my/id/eprint/10463/ http://umpir.ump.edu.my/id/eprint/10463/1/fkm-2010-zakri-Design%20of%20electrostatic.pdf http://umpir.ump.edu.my/id/eprint/10463/7/fkm-2010-zakri-%20Design%20of%20Electrostatic.pdf

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