Deposition and characterization of germanium nitride film using different thermal nitridation temperature / Low Yan Jie

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Deposition and characterization of germanium nitride film using different thermal nitridation temperature / Low Yan Jie

This study is aimed at investigating the effect of thermal nitridation temperature on the growth of germanium nitride (?-Ge3N4) thin film and its effectiveness as a buffer layer to suppress the growth of unwanted germanium oxide (GeO2) interfacial layer. The ?-Ge3N4 films were grown on germanium sub...

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Bibliographic Details
Main Author:	Low , Yan Jie
Format:	Thesis
Published:	2018
Subjects:	T Technology (General) TJ Mechanical engineering and machinery
Online Access:	http://studentsrepo.um.edu.my/9625/ http://studentsrepo.um.edu.my/9625/1/Low_Yan_Jie.jpg http://studentsrepo.um.edu.my/9625/8/Low_Yan_Jie_KQJ170002.pdf

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