Effect of Oxidation temperature on the thin film samarium (III) oxide growth on germanium subtrate / Gary Tan

QR Code

Effect of Oxidation temperature on the thin film samarium (III) oxide growth on germanium subtrate / Gary Tan

Searching for high-κ gate oxide has been an important task in the semiconductor industry for further downscaling. In this study, pure samarium (Sm) metal was first sputtered on germanium (Ge) substrate, and then proceeded to thermal oxidation for 15 minutes at varying oxidation temperatures of 300°C...

Full description

Bibliographic Details
Main Author:	Gary, Tan
Format:	Thesis
Published:	2018
Subjects:	T Technology (General) TJ Mechanical engineering and machinery
Online Access:	http://studentsrepo.um.edu.my/9560/ http://studentsrepo.um.edu.my/9560/1/Gary_Tan.jpg http://studentsrepo.um.edu.my/9560/9/Gary_Tan_KQJ170003.pdf

Similar Items

Samarium oxide and samarium oxynitride thin film gate oxides on silicon substrate / Goh Kian Heng
by: Goh, Kian Heng
Published: (2017)

Samarium (III) oxide thin film as a saturable absorber for the passively Q-switched Tm-doped fiber laser
by: Rusdi, K.N., et al.
Published: (2019)

Temperature-Dependent Structural Behaviour of Samarium Cobalt Oxide
by: Rowles, Matthew, et al.
Published: (2017)

Q-switching pulses generation with samarium oxide film saturable absorber
by: Nur F., Zulkifli, et al.
Published: (2019)

Optical, physical and structural properties of zinc-borotellurite glass doped with samarium oxide and samarium oxide nanoparticles
by: Saleh Abuzlilia, Hajer Saad
Published: (2015)

Neodymium oxide thin film gate oxide on silicon substrate / Hetherin Karuppiah
by: Hetherin , Karuppiah
Published: (2018)

Effect of Substrate Orientation on the Growth of Germanium Oxide in Dry Oxygen Ambience
by: Sahari, S.K., et al.
Published: (2017)

Samarium strontium cobalt oxide – samarium doped ceria carbonate (SSC-SDCC) as a new potential composite cathode material for low temperature solid oxide fuel cell
by: Mohammad, Siti Fairus
Published: (2021)

Deposition and characterization of germanium nitride film using different thermal nitridation temperature / Low Yan Jie
by: Low , Yan Jie
Published: (2018)

Microstructural and physical properties of samarium orthoferrite thin films by the sol-gel method
by: Baqiah, Hussein, et al.
Published: (2022)

Growth And Characterization Of Nanostructured Nickel Oxide Thin Films For Photodetection Applications
by: Ahmed, Anas Awad Hasan
Published: (2020)

Piezoelectric effect of zinc oxide thin film as source of energy for sensor applications
by: Sutjipto, Agus Geter Edy, et al.
Published: (2011)

Structural, elastic and optical properties of zinc tellurite glass system doped with samarium, samarium nanoparticles and silver oxide
by: Abubakar, Tafida Rabiu
Published: (2021)

Effects Of Strontium And Samarium Dopants On The Dielectric Properties Of Nickel Oxide
by: Mohd Salim, Nurul Nadia
Published: (2017)

The potential of artificial live rock as subtrate for coral spat and epibenthic organisms
by: Yusof, Muhammad Hamizan, et al.
Published: (2015)

A review on copper oxide thin films
by: Ho, Soon Min
Published: (2016)

Preparation and characterization of tungsten oxide thin films
by: Ho, Soon Min
Published: (2016)

Fabrication And Characterization Of Germanium, Zinc Oxide And Their Compounds By Thermal Evaporation Technique
by: Jumidali, Mohd Muzafa
Published: (2015)

Effect Of Annealing Temperature On Cerium Oxide Thin Films Grown By DC Sputtering Method
by: Ainita Rozati Mohd, Zabidi, et al.
Published: (2020)

Effect Of Annealing Temperature On Cerium Oxide Thin Films Grown By Dc Sputtering Method
by: Zabidi, Ainita Rozati Mohd, et al.
Published: (2020)

Physical and optical characterization of samarium oxide - doped niobium tellurite glasses
by: Mohd. Nasir, Nuraffera
Published: (2007)

Growth And Physical Characterization Of Native Oxide Thin Film On N-Type Gallium Nitride Substrate By Ti-Iermal Oxidation In Nitrous Oxide Ambient
by: Oon, Hooi Shy
Published: (2013)

Electrochemical performance of barium strontium cobalt ferrite - samarium doped ceria - argentum for low temperature solid oxide fuel cell
by: Asyikin Yusop, Umira, et al.
Published: (2020)

Influence of sulfurization temperature on the growth of MoS2 thin films
by: Tan, A. L., et al.
Published: (2018)

Investigations of structural and optical properties of zinc oxide thin films growth on various substrates
by: Ribut, Siti Huzaimah, et al.
Published: (2019)

Study on nanostructured zinc oxide thin films characteristics
by: Mohd Rodzi, Ana Syahidah
Published: (2014)

Fabrication And Physical Characterisation Of Zinc Oxide Thin Films
by: Lim , Yam Tee
Published: (2012)

Fabrication And Characterizations Of Porous Zinc Oxide Thin Films
by: Ching, Chin Guan
Published: (2013)

Synthesis and characterization of aluminium - doped zinc oxide thin films for cell
by: Tan, Hang Khume
Published: (2007)

Enhanced toxicity and antifungal effects of iron-oxide chitosan/samarium/ranitidine microparticles
by: Kusrini, Eny, et al.
Published: (2025)

Shynthesis and characterization of wollastonite glassceramics prepared from cullet doped with samarium oxide
by: Almasri, Karima A Mohamed
Published: (2018)

Biocompatible and antibacterial silver tantalum oxide thin film by magnetron sputtering for surgical applications / Rodianah Alias
by: Rodianah , Alias
Published: (2019)

Preparation of tin oxide (SnO2) thin films using thermal oxidation
by: Nuraini, Abdullah, et al.
Published: (2018)

Effects of post-deposition annealing temperatures on the composition of interfacial layer at germanium (Ge) /aluminium oxide (Al2O3)
by: Siti Kudnie Sahari,, et al.
Published: (2019)

Anodic and hydrothermal growth of iron oxide Nanoporous-Nanorod film for chromium removal
by: Chuah, Chung Zhih
Published: (2021)

Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
by: Mohamad, Souad A., et al.
Published: (2014)

Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
by: Mohamad, Souad A., et al.
Published: (2015)

Preparation and Characterization of Nickel Oxide Thin Films: A review
by: Ho, Soon Min
Published: (2016)

Synthesis and characterization of tin oxide thin films: A review
by: Ho, Soon Min
Published: (2016)

Synthesis and properties of cadmium oxide thin films: a review
by: Ho, Soon Min
Published: (2016)