Reclamation of industry wastewater as a renewable source for cooling water system: A case study for a semiconductor plant / Yim Yan Han

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Reclamation of industry wastewater as a renewable source for cooling water system: A case study for a semiconductor plant / Yim Yan Han

Deionized water is generally used to rinse the integrated circuit (IC) crystal chips in semiconductor manufacturing. Wastewater generated in the semiconductor manufacturing need to be collected and treated as regulated by Department of Environment (DOE) Malaysia. On the other hand, cooling system...

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Bibliographic Details
Main Author:	Yim, Yan Han
Format:	Thesis
Published:	2018
Subjects:	T Technology (General) TP Chemical technology
Online Access:	http://studentsrepo.um.edu.my/9200/ http://studentsrepo.um.edu.my/9200/1/Yim_Yan_Han.jpg http://studentsrepo.um.edu.my/9200/8/KQD160013%2DYim_Yan_Han_2copy_(dark_blue)_COLOR_PRINT_%2B1cd.pdf

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