Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition / Mohd Azam Abdul Rahman

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Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition / Mohd Azam Abdul Rahman

The amorphous structured silicon carbide (a-SiC) thin films have been the focus of many studies due to its potential applications for high temperature devices operation in complement to conventional silicon microelectronics. Incorporation of nitrogen to silicon carbide thin films, has offered an eff...

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Bibliographic Details
Main Author:	Mohd Azam , Abdul Rahman
Format:	Thesis
Published:	2018
Subjects:	Q Science (General) QC Physics
Online Access:	http://studentsrepo.um.edu.my/8640/ http://studentsrepo.um.edu.my/8640/1/Mohd_Azam.pdf http://studentsrepo.um.edu.my/8640/6/azam.pdf

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