Probing technique for energy distribution of positive charges in gate dielectrics and its application to lifetime prediction / Sharifah Fatmadiana Wan Muhamad Hatta

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Probing technique for energy distribution of positive charges in gate dielectrics and its application to lifetime prediction / Sharifah Fatmadiana Wan Muhamad Hatta

The continuous reduction of the dimensions of CMOS devices has increased the negative bias temperature instability (NBTI) of pMOSFETs to such a level that it is limiting their lifetime. This increase of NBTI is caused mainly by three factors: an increase of nitrogen concentration in gate dielectric,...

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Bibliographic Details
Main Author:	Sharifah Fatmadiana , Wan Muhamad Hatta
Format:	Thesis
Published:	2013
Subjects:	T Technology (General) TJ Mechanical engineering and machinery
Online Access:	http://studentsrepo.um.edu.my/8287/ http://studentsrepo.um.edu.my/8287/5/Thesis_SharifahFatmadiana_Dec_2013.pdf

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