High aspect ratio microfilling for MEMS using metal nanopowder / Fatin Syazana Jamaludin

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High aspect ratio microfilling for MEMS using metal nanopowder / Fatin Syazana Jamaludin

High aspect ratio microstructures (HARMS) are sought in MEMS devices, as they fulfil several criteria such as low driving voltage, increased structural rigidity, higher sensitivity in sensor systems, bigger displacement and greater actuation force in actuator applications, and larger magnetic forces...

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Bibliographic Details
Main Author:	Fatin Syazana , Jamaludin
Format:	Thesis
Published:	2013
Subjects:	T Technology (General) TJ Mechanical engineering and machinery
Online Access:	http://studentsrepo.um.edu.my/8169/ http://studentsrepo.um.edu.my/8169/4/HIGH_ASPECT_RATIO_MICROFILLING_FOR_MEMS_USING_METAL_NANOPOWDER.pdf

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