Samarium oxide and samarium oxynitride thin film gate oxides on silicon substrate / Goh Kian Heng

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Samarium oxide and samarium oxynitride thin film gate oxides on silicon substrate / Goh Kian Heng

Sputtered pure samarium (Sm) metal films on silicon substrates were thermally oxidized and oxynitrided at various temperatures (600 – 900 °C) and durations (5 – 20 min). Effects of thermal oxidation ambient in oxygen (O2) and nitrous oxide (N2O) gas ambient on the physical and electrical properti...

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Bibliographic Details
Main Author:	Goh, Kian Heng
Format:	Thesis
Published:	2017
Subjects:	Q Science (General) T Technology (General)
Online Access:	http://studentsrepo.um.edu.my/7132/ http://studentsrepo.um.edu.my/7132/4/kian_heng.pdf

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