Hot-wire chemical vapour deposition of silicon carbide thin films from pure silane and methane gases / Fatemeh Shariatmadar Tehrani

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Hot-wire chemical vapour deposition of silicon carbide thin films from pure silane and methane gases / Fatemeh Shariatmadar Tehrani

A hot-wire chemical vapour deposition (HWCVD) system is a simple and cost-effective technique for deposition of Si-based films. Silicon carbide (SiC) on the other hand is a very interesting material with many unique properties. This work is directed towards understanding how the structural propertie...

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Bibliographic Details
Main Author:	Tehrani, Fatemeh Shariatmadar
Format:	Thesis
Published:	2013
Subjects:	QC Physics
Online Access:	http://studentsrepo.um.edu.my/5858/ http://studentsrepo.um.edu.my/5858/1/Ph._D._Thesis_Fatemeh_Shariatmadar_Tehrani%2DSHC080058.pdf

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