Characterization of an inductively coupled plasma produced in argon at 13.56 MHz / Lim Ai Nuan

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Characterization of an inductively coupled plasma produced in argon at 13.56 MHz / Lim Ai Nuan

The electrical and plasma characteristics of radio frequency (13.56 MHz) inductively coupled argon plasma (RF ICP) were studied in this project. On the electrical breakdown properties, the breakdown voltage has a general appearance of Paschen’s curve and the minimum is achieved at 0.1 mbar. After ig...

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Bibliographic Details
Main Author:	Lim, Ai Nuan
Format:	Thesis
Published:	2010
Subjects:	Q Science (General) QC Physics
Online Access:	http://pendeta.um.edu.my/client/default/search/detailnonmodal/ent:$002f$002fSD_ILS$002f796$002fSD_ILS:796605/one?qu=Characterization+of+an+inductively+coupled+plasma+produced http://studentsrepo.um.edu.my/4309/1/Dissertation_of_Lim_Ai_Nuan_(MSc_2010).pdf

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