APA (7th ed.) Citation

Lim, W. H. (2010). Optimization of inductively coupled plasma dry etching for planar waveguide fabrication / Lim Weng Hong.

Chicago Style (17th ed.) Citation

Lim, Weng Hong. Optimization of Inductively Coupled Plasma Dry Etching for Planar Waveguide Fabrication / Lim Weng Hong. 2010.

MLA (9th ed.) Citation

Lim, Weng Hong. Optimization of Inductively Coupled Plasma Dry Etching for Planar Waveguide Fabrication / Lim Weng Hong. 2010.

Warning: These citations may not always be 100% accurate.