APA (7th ed.) Citation

Chuah, K. S. (2010). Inductively coupled plasma dry etching process on planar lightwave circuit fabrication / Chuah Khoon Seah.

Chicago Style (17th ed.) Citation

Chuah, Khoon Seah. Inductively Coupled Plasma Dry Etching Process on Planar Lightwave Circuit Fabrication / Chuah Khoon Seah. 2010.

MLA (9th ed.) Citation

Chuah, Khoon Seah. Inductively Coupled Plasma Dry Etching Process on Planar Lightwave Circuit Fabrication / Chuah Khoon Seah. 2010.

Warning: These citations may not always be 100% accurate.