Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon

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Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon

Bibliographic Details
Main Author:	Liew, Wai Soon
Format:	Thesis
Published:	2001
Subjects:	QC Physics
Online Access:	http://www.pendeta.um.edu.my/uhtbin/cgisirsi/x/P01UTAMA/0/5?searchdata1="Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system"{245} http://studentsrepo.um.edu.my/2891/1/ABSTRAK.pdf http://studentsrepo.um.edu.my/2891/2/KANDUNGAN.pdf http://studentsrepo.um.edu.my/2891/3/PENDAHULUAN.pdf http://studentsrepo.um.edu.my/2891/4/BAB_1.pdf http://studentsrepo.um.edu.my/2891/5/BAB_2.pdf http://studentsrepo.um.edu.my/2891/6/BAB_3.pdf http://studentsrepo.um.edu.my/2891/7/BAB_4.pdf http://studentsrepo.um.edu.my/2891/8/BAB_5.pdf http://studentsrepo.um.edu.my/2891/9/BIBLIOGRAFI.pdf

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