Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon
| _version_ | 1848772284471312384 |
|---|---|
| author | Liew, Wai Soon |
| author_facet | Liew, Wai Soon |
| author_sort | Liew, Wai Soon |
| building | UM Research Repository |
| collection | Online Access |
| first_indexed | 2025-11-14T13:24:04Z |
| format | Thesis |
| id | um-2891 |
| institution | University Malaya |
| institution_category | Local University |
| last_indexed | 2025-11-14T13:24:04Z |
| publishDate | 2001 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | um-28912014-10-08T13:07:41Z Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon Liew, Wai Soon QC Physics 2001 Thesis NonPeerReviewed application/pdf http://studentsrepo.um.edu.my/2891/1/ABSTRAK.pdf application/pdf http://studentsrepo.um.edu.my/2891/2/KANDUNGAN.pdf application/pdf http://studentsrepo.um.edu.my/2891/3/PENDAHULUAN.pdf application/pdf http://studentsrepo.um.edu.my/2891/4/BAB_1.pdf application/pdf http://studentsrepo.um.edu.my/2891/5/BAB_2.pdf application/pdf http://studentsrepo.um.edu.my/2891/6/BAB_3.pdf application/pdf http://studentsrepo.um.edu.my/2891/7/BAB_4.pdf application/pdf http://studentsrepo.um.edu.my/2891/8/BAB_5.pdf application/pdf http://studentsrepo.um.edu.my/2891/9/BIBLIOGRAFI.pdf http://www.pendeta.um.edu.my/uhtbin/cgisirsi/x/P01UTAMA/0/5?searchdata1="Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system"{245} Liew, Wai Soon (2001) Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon. Masters thesis, University of Malaya . http://studentsrepo.um.edu.my/2891/ |
| spellingShingle | QC Physics Liew, Wai Soon Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon |
| title | Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon |
| title_full | Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon |
| title_fullStr | Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon |
| title_full_unstemmed | Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon |
| title_short | Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon |
| title_sort | diamondlike carbon thin film deposition using a rf planar coil inductively coupled plasma system / liew wai soon |
| topic | QC Physics |
| url | http://www.pendeta.um.edu.my/uhtbin/cgisirsi/x/P01UTAMA/0/5?searchdata1="Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system"{245} http://www.pendeta.um.edu.my/uhtbin/cgisirsi/x/P01UTAMA/0/5?searchdata1="Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system"{245} http://studentsrepo.um.edu.my/2891/1/ABSTRAK.pdf http://studentsrepo.um.edu.my/2891/2/KANDUNGAN.pdf http://studentsrepo.um.edu.my/2891/3/PENDAHULUAN.pdf http://studentsrepo.um.edu.my/2891/4/BAB_1.pdf http://studentsrepo.um.edu.my/2891/5/BAB_2.pdf http://studentsrepo.um.edu.my/2891/6/BAB_3.pdf http://studentsrepo.um.edu.my/2891/7/BAB_4.pdf http://studentsrepo.um.edu.my/2891/8/BAB_5.pdf http://studentsrepo.um.edu.my/2891/9/BIBLIOGRAFI.pdf |