Experimental and numerical studies on a metallic pulsed capillary discharge as an Extreme Ultra-Violet (EUV) Source / Chan Li San

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Experimental and numerical studies on a metallic pulsed capillary discharge as an Extreme Ultra-Violet (EUV) Source / Chan Li San

A system for the generation of metallic capillary discharge plasma has been developed and studied. The quartz capillary is initially evacuated to a low pressure of 10-5 mbar. The transient hollow cathode discharge (THCD) generated high energy electron beam is employed to initiate the discharge by va...

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Bibliographic Details
Main Author:	Chan , Li San
Format:	Thesis
Published:	2016
Subjects:	Q Science (General) QC Physics
Online Access:	http://studentsrepo.um.edu.my/12536/ http://studentsrepo.um.edu.my/12536/1/Chan_Li_San.pdf http://studentsrepo.um.edu.my/12536/2/Chan_Li_San.pdf

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