Formation of ZrO2 gate dielectric on Ge substrate by thermal oxidation and post annealing for metal-oxide-semiconductor devices / Lei Zhen Ce

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Formation of ZrO2 gate dielectric on Ge substrate by thermal oxidation and post annealing for metal-oxide-semiconductor devices / Lei Zhen Ce

Sputtered pure zirconium (Zr) metal films on germanium (Ge) substrates were thermally oxidized/nitrided at various temperatures (300 – 800 °C) for 15 minutes. Furthermore, some of the samples performed post oxidation annealing at various temperatures (400 – 800 °C). Effects of thermal oxidation/nitr...

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Bibliographic Details
Main Author:	Lei , Zhen Ce
Format:	Thesis
Published:	2019
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://studentsrepo.um.edu.my/11120/ http://studentsrepo.um.edu.my/11120/2/Lei_Zhen_Ce.pdf http://studentsrepo.um.edu.my/11120/1/Lei_Zhen_Ce.pdf

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