Piezoelectric micropump with nanoliter per minute flow for drug delivery systems

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Piezoelectric micropump with nanoliter per minute flow for drug delivery systems

Piezoelectric Actuated Valveless Micropump (PAVM) has been designed and successfully fabricated using MEMS fabrication processes. The micropump uses a PZT: Pb(ZrTi)Ox ceramic plate to actuate a silicon membrane which bends when a voltage is applied to the piezoelectric actuator. The resultant recipr...

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Bibliographic Details
Main Authors:	Juliana Johari, Jumril Yunas, Azrul Azlan Hamzah, Burhanuddin Yeop Majlis
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2011
Online Access:	http://journalarticle.ukm.my/709/ http://journalarticle.ukm.my/709/1/13_Juliana.pdf

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