MEMS very low capacitive pressure sensor based on CMOS process

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MEMS very low capacitive pressure sensor based on CMOS process

The CMOS standard process with advantage of simplicity in term of design and fabrication process compatibility has triggered the invention of MEMS very low capacitive pressure sensor, (MEMS-VLCPS). In this paper the development of the whole structure of MEMS-VLCPS that involves the design simulation...

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Bibliographic Details
Main Authors:	Muhamad Ramdzan Buyong, Norazreen Abd Aziz, Burhanuddin Yeop Majlis
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2011
Online Access:	http://journalarticle.ukm.my/707/ http://journalarticle.ukm.my/707/1/11_Muhammad_Ramdzan.pdf

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