Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films

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Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films

The effects of annealing parameters on crystallinity and surface morphology of RF sputtered zinc oxide nano films were investigated. The structure and morphology of the nano films were dependent on temperature, gas flow rate and time of annealing. The results from atomic force microscopy (AFM), fiel...

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Bibliographic Details
Main Authors:	J. Karamdel, C.F. Dee, B. Yeop Majlis
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2011
Online Access:	http://journalarticle.ukm.my/699/ http://journalarticle.ukm.my/699/1/03_Javad_Karamdel.pdf

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