Microstructural characterization of Au-In Thin film deposited by electron beam evaporation

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Microstructural characterization of Au-In Thin film deposited by electron beam evaporation

The microstructure and phase formation of Au-In thin film deposited by e-beam evaporation technique has been studied. Single crystals of rocksalt were used as the substrates. The chamber pressure during deposition was about 2.5  10-5 torr and substrate temperature was 35ºC. Three types of samples...

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Bibliographic Details
Main Authors:	Norliza Ismail, Muhammad Azmi Abdul Hamid, Azman Jalar
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2009
Online Access:	http://journalarticle.ukm.my/62/ http://journalarticle.ukm.my/62/1/

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