Characterization of alignment strategy to achieve a reliable alignment accuracy in advanced lithography

QR Code

Characterization of alignment strategy to achieve a reliable alignment accuracy in advanced lithography

One of the most crucial challenges in lithography is achieving rapid and accurate alignment under a wide variety of conditions brought about by different processing steps. Processing steps may change the nature of alignment mark. Either the mark is deformed or the mark proﬁle is asymmetric, a change...

Full description

Bibliographic Details
Main Authors:	Normah Ahmad, Uda Hashim, Mohd Jeffery Manaf, Kadir Ibrahim Abdul Wahab
Format:	Article
Language:	English
Published:	2007
Online Access:	http://journalarticle.ukm.my/1459/ http://journalarticle.ukm.my/1459/1/2007-Article_2_K-19.pdf

Similar Items

Active alignment and reliable pigtailing if laser of diode transmitter
by: Fadhali, Mohamed, et al.
Published: (2008)

Active alignment and reliable pigtailing of laser diode transmitter
by: Fadhali, Mohammed, et al.
Published: (2008)

Alignment and Alignment Transition of Bent Core Nematics
by: Hegde, Gurumurthy, et al.
Published: (2013)

Strategic Alignment between IT and Business Strategy
by: Arafat, Mohamad Adnan
Published: (2007)

EPT and the CEFR: are they aligned?
by: Engku Ibrahim, Engku Haliza, et al.
Published: (2019)

Does Employee Alignment Affect Business-IT Alignment? An Empirical Analysis
by: Chong, Alain Yee Loong, et al.
Published: (2011)

Alignment between strategy and intellectual capital development
by: Noradiva Hamzah,, et al.
Published: (2007)

Aligning cloud computing security with business strategy
by: Mohamed Hassan El-Hoby, Hany, et al.
Published: (2014)

A mechatronic system for achieving optimum alignment of lower limb prosthesis
by: Tee, Kian Sek
Published: (2011)

A mechatronic system for achieving optimum alignment of lower limb prosthesis
by: Tee, Kian Sek
Published: (2011)

Alignment between data warehouse design and business strategy
by: Mior Nazri, Mior Nasir, et al.
Published: (2015)

Advances in Alignment Based Optically Pumped Magnetometers: Techniques, Characterisation and Applications
by: Elson, Lucy Jade
Published: (2025)

An online platform for reading comprehension achievements data: A cefr-aligned system
by: Asiah, Kassim, et al.
Published: (2019)

Aligning Islamic spirituality to medical imaging
by: Zainuddin, Zainul Ibrahim
Published: (2017)

Business-IT Alignment through Enterprise Architecture in a Strategic Alignment Dimension: A Review
by: Yoppy Mirza, Maulana, et al.
Published: (2023)

Strategic IT Alignment with Business Strategy: Service Oriented Architecture Approach
by: Mohammad, Abdi, et al.
Published: (2010)

IT Adoption in Westports Customer Service and Alignment to Its Business Strategy
by: Vyithelingam, Jananandh
Published: (2008)

Information security aligned to enterprise management
by: Abdullah, Istikoma, et al.
Published: (2015)

Robust and efficient parametric face alignment
by: Tzimiropoulos, Georgios, et al.
Published: (2011)

Construction regulations along metro alignment
by: Ghiasi, Vahed, et al.
Published: (2010)

Optical characterization of tip bended vertically aligned carbon nanotubes array
by: Mohd Razib, Mohd Asyraf, et al.
Published: (2018)

An ex-situ method to convert vertically aligned carbon nanotubes array to horizontally aligned carbon nanotubes mat
by: Islam, Saiful, et al.
Published: (2019)

Strategy, strategic alignment, and the market environment: a case study of CE Turner
by: Mcgrath, Joseph
Published: (2015)

Vision-based object’s shape determination for robot alignment
by: Farah Adiba, Azman, et al.
Published: (2018)

Alignment To CEFR And IELTS: The CELPAD IIUM Initiative
by: Abu Kassim, Noor Lide, et al.
Published: (2018)

Responsibility-value alignment in information security governance
by: Abdul Munir, Rufizah, et al.
Published: (2018)

The relation between leptin hormone and orthodotic alignment
by: Mustafa Al-Ahmad, Basma Ezzat
Published: (2020)

Active orientation models for face alignment in-the-wild
by: Tzimiropoulos, Georgios, et al.
Published: (2014)

Information technology and business alignment in Malaysian SMEs
by: Suhaimi, Mohd Adam, et al.
Published: (2011)

IT alignment and firm performance in small manufacturing firms
by: Cragg, Paul, et al.
Published: (2002)

Aligning affordances of graphics with learning task requirements
by: Lowe, Ric, et al.
Published: (2011)

Deep learning for real world face alignment
by: Bulat, Adrian
Published: (2019)

Aligning the context of rural tourism policies in Sabah
by: Siow, May Ling, et al.
Published: (2012)

Semantic Lexical Alignment For Domain-Specific Ontologies.
by: Abu-Shareha, Ahmad Adel, et al.
Published: (2009)

A Study on the Relationship between Management Accounting Practices, Strategy Alignment and Organizational Performance
by: Lee, Mei Yi
Published: (2014)

The important elements in organizational alignment towards achieving high performance in MISC Berhad / Nur Afiqah Nabilah Azhidi
by: Azhidi, Nur Afiqah Nabilah
Published: (2014)

Alignment problems of timber production in architecture-engineering-construction projects
by: Fallahian, Farhad, et al.
Published: (2012)

Schottky behavior of novel synthesized aligned zinc oxide nanorod arrays and aligned carbon nanotube arrays for mesfet device / Salina Muhamad
by: Muhamad, Salina
Published: (2012)

The efficacy of alignment-based and alignment-free methods in reconstructing phylogenetic trees using complete mitochondrial DNA sequence / Elham Yousef Kalafi
by: Kalafi, Elham Yousef
Published: (2012)

Recent Advances in Nano Patterning and Nano Imprint Lithography for Biological Applications
by: N., Vigneswaran, et al.
Published: (2014)