The fabrication and evaluation of on-chip gas pressure sensors

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The fabrication and evaluation of on-chip gas pressure sensors

In this paper we describe the fabrication and evaluation of on-chip silicon-based gas pressure sensors. The sensor is fabricated using standard Integrated Circuit (IC) fabrication technology except the final etching to delineate cantilever beams. The beam which is the key element in the sensor sy...

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Bibliographic Details
Main Author:	Masuri Othman
Format:	Article
Published:	1990
Online Access:	http://journalarticle.ukm.my/1288/

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