Fabrication of MSM UV photodetector based on ZnO films synthesized by RF magnetron sputtering / Halim Ahmad, Mat Johar Abdullah and Ajis Lepit

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Fabrication of MSM UV photodetector based on ZnO films synthesized by RF magnetron sputtering / Halim Ahmad, Mat Johar Abdullah and Ajis Lepit

C-axis oriented ZnO films were deposited on SiO2/Si substrates through RF magnetron sputtering, MSM UV photodetector using Ag/ZnO/Ag configuration were fabricated from the as prepared film while the heat treated film was used to fabricate MSM Schottky barrier UV photodetector using Al/ZnO/Ag configu...

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Bibliographic Details
Main Authors:	Ahmad, Halim, Abdullah, Mat Johar, Lepit, Ajis
Format:	Article
Language:	English
Published:	Universiti Teknologi MARA, Sabah 2017
Subjects:	Metal oxide semiconductors Detectors. Sensors. Sensor networks Photoelectronic devices (General)
Online Access:	https://ir.uitm.edu.my/id/eprint/34421/

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